A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
ELECTROSTATIC PROTECTION FILM, ARTICLE HANDLING DEVICE, AND ELECTROSTATIC PROTECTION MEMBER
To provide an electrostatic protection film, an article handling device and an electrostatic protection member, in which static electricity is less likely to be generated and which, even when electrostatic discharge occurs, can protect an object to be protected from the electrostatic discharge.SOLUTION: An electrostatic protection film for protecting an object to be protected from electrostatic discharge is composed of a carbon film whose surface resistance is greater than 3×10Ω and equal to or less than 1×10Ω and half-life of the surface charge is 10 nano-seconds or more and 60 seconds or less. Further, an article handling device and an electrostatic protection member provided with the electrostatic protection film comprising the carbon film are provided.SELECTED DRAWING: Figure 1
【課題】本件発明の課題は静電気が発生しにくく、静電気放電が生じた際にも保護対象物を静電気放電から保護することのできる静電気保護被膜、物品ハンドリング装置及び静電気保護部材を提供することにある。【解決手段】上記課題を解決するため、静電気放電から保護対象物を保護するための静電気保護被膜を、表面抵抗が３×１０４Ωより大きく１×１０１２Ω以下であり、且つ、表面電荷の半減期が１０ナノ秒以上６０秒以下の炭素皮膜により構成する。また、当該炭素皮膜からなる静電気保護被膜を備えた物品ハンドリング装置及び静電気保護部材とする。【選択図】図１
ELECTROSTATIC PROTECTION FILM, ARTICLE HANDLING DEVICE, AND ELECTROSTATIC PROTECTION MEMBER
To provide an electrostatic protection film, an article handling device and an electrostatic protection member, in which static electricity is less likely to be generated and which, even when electrostatic discharge occurs, can protect an object to be protected from the electrostatic discharge.SOLUTION: An electrostatic protection film for protecting an object to be protected from electrostatic discharge is composed of a carbon film whose surface resistance is greater than 3×10Ω and equal to or less than 1×10Ω and half-life of the surface charge is 10 nano-seconds or more and 60 seconds or less. Further, an article handling device and an electrostatic protection member provided with the electrostatic protection film comprising the carbon film are provided.SELECTED DRAWING: Figure 1
【課題】本件発明の課題は静電気が発生しにくく、静電気放電が生じた際にも保護対象物を静電気放電から保護することのできる静電気保護被膜、物品ハンドリング装置及び静電気保護部材を提供することにある。【解決手段】上記課題を解決するため、静電気放電から保護対象物を保護するための静電気保護被膜を、表面抵抗が３×１０４Ωより大きく１×１０１２Ω以下であり、且つ、表面電荷の半減期が１０ナノ秒以上６０秒以下の炭素皮膜により構成する。また、当該炭素皮膜からなる静電気保護被膜を備えた物品ハンドリング装置及び静電気保護部材とする。【選択図】図１
ELECTROSTATIC PROTECTION FILM, ARTICLE HANDLING DEVICE, AND ELECTROSTATIC PROTECTION MEMBER
静電気保護被膜、物品ハンドリング装置及び静電気保護部材
YAMAMOTO SHUJI (author) / HASEGAWA NAOYA (author)
2020-06-18
Patent
Electronic Resource
Japanese
| European Patent Office | 2023
| European Patent Office | 2023
| European Patent Office | 2023
| European Patent Office | 2023
ELECTROSTATIC CHUCK MEMBER AND ELECTROSTATIC CHUCK DEVICE
| European Patent Office | 2023