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MANUFACTURING METHOD OF FLAME SPRAY FILM COATED MEMBER
To provide a manufacturing method of a flame spray film coated member capable of improving an adhesion strength of an oxide based flame spray ceramic film such as Y2O3 for a base material composed of an AlN sintered body.SOLUTION: A base material 1 composed of an AlN sintered body of which flame-sprayed surface 10 has a surface roughness Ra in a range of 0.05 - 1 μm of is prepared (figure 1/STEP02). For example, a non-oxidative gas plasma is irradiated to the flame-sprayed surface 10 of the base material 1 using a first plasma flame spray apparatus (figure 1//STEP04). A slurry is plasma-sprayed to the flame-sprayed surface 10 of the base material 1 using the non-oxidative gas and a second plasma flame spray apparatus, the slurry being prepared from an oxide-based ceramic raw material powder in a particle diameter D50 range of 0.5 - 6 μm and an aqueous solvent (figure 1/STEP06).SELECTED DRAWING: Figure 1
【課題】ＡｌＮ焼結体からなる基材に対してＹ2Ｏ3等の酸化物系セラミックス溶射膜の密着強度の向上を図りうる、溶射膜被覆部材の製造方法を提供する。【解決手段】被溶射面１０の表面粗さＲａが０．０５〜１μｍの範囲に含まれているＡｌＮ焼結体からなる基材１が準備される（図１／ＳＴＥＰ０２）。例えば第１プラズマ溶射機が用いられて基材１の被溶射面１０に非酸化性ガスプラズマが照射される（図１／ＳＴＥＰ０４）。基材１の被溶射面１０に粒子径Ｄ５０が０．５〜６μｍの範囲に含まれる酸化物系セラミックス原料粉末および水系溶媒から調整されたスラリーが、非酸化性ガスを用いて、第２プラズマ溶射機が用いられてプラズマ溶射される（図１／ＳＴＥＰ０６）。【選択図】図１
MANUFACTURING METHOD OF FLAME SPRAY FILM COATED MEMBER
To provide a manufacturing method of a flame spray film coated member capable of improving an adhesion strength of an oxide based flame spray ceramic film such as Y2O3 for a base material composed of an AlN sintered body.SOLUTION: A base material 1 composed of an AlN sintered body of which flame-sprayed surface 10 has a surface roughness Ra in a range of 0.05 - 1 μm of is prepared (figure 1/STEP02). For example, a non-oxidative gas plasma is irradiated to the flame-sprayed surface 10 of the base material 1 using a first plasma flame spray apparatus (figure 1//STEP04). A slurry is plasma-sprayed to the flame-sprayed surface 10 of the base material 1 using the non-oxidative gas and a second plasma flame spray apparatus, the slurry being prepared from an oxide-based ceramic raw material powder in a particle diameter D50 range of 0.5 - 6 μm and an aqueous solvent (figure 1/STEP06).SELECTED DRAWING: Figure 1
【課題】ＡｌＮ焼結体からなる基材に対してＹ2Ｏ3等の酸化物系セラミックス溶射膜の密着強度の向上を図りうる、溶射膜被覆部材の製造方法を提供する。【解決手段】被溶射面１０の表面粗さＲａが０．０５〜１μｍの範囲に含まれているＡｌＮ焼結体からなる基材１が準備される（図１／ＳＴＥＰ０２）。例えば第１プラズマ溶射機が用いられて基材１の被溶射面１０に非酸化性ガスプラズマが照射される（図１／ＳＴＥＰ０４）。基材１の被溶射面１０に粒子径Ｄ５０が０．５〜６μｍの範囲に含まれる酸化物系セラミックス原料粉末および水系溶媒から調整されたスラリーが、非酸化性ガスを用いて、第２プラズマ溶射機が用いられてプラズマ溶射される（図１／ＳＴＥＰ０６）。【選択図】図１
MANUFACTURING METHOD OF FLAME SPRAY FILM COATED MEMBER
溶射膜被覆部材の製造方法
CHIBA MASAHIRO (author) / IWABUCHI ATSUHISA (author)
2021-02-22
Patent
Electronic Resource
Japanese
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