A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
NITRIDE MATERIAL AND PIEZOELECTRIC MATERIAL COMPRISING THE SAME, AND MEMS DEVICE COMPRISING PIEZOELECTRIC MATERIAL
To provide a nitride material having at least one value of high figures of merit (piezoelectric constants (d33), piezoelectric stress constants (e33), elastic constants (C33), piezoelectric output constants (g33) and electromechanical coupling constants (k2), and a piezoelectric material comprising the same, and an MEMS device comprising the piezoelectric material.SOLUTION: The present disclosure provides a nitride material represented by chemical formula Al1-XYbXN, where the value of X is 0.60 or more and 1.00 or less.SELECTED DRAWING: Figure 5
【課題】高い性能指数（圧電定数（ｄ３３）、圧電応力定数（ｅ３３）、弾性定数（Ｃ３３）、圧電出力定数（ｇ３３）および電気機械結合定数（ｋ２）の少なくとも何れか１つ）の値を有する窒化物材料およびそれからなる圧電体並びにその圧電体を用いたＭＥＭＳデバイスを提供する。【解決手段】化学式Ａｌ１−ＸＹｂＸＮで表され、Ｘの値が０．６０以上で１．００以下の範囲にある。【選択図】図５
NITRIDE MATERIAL AND PIEZOELECTRIC MATERIAL COMPRISING THE SAME, AND MEMS DEVICE COMPRISING PIEZOELECTRIC MATERIAL
To provide a nitride material having at least one value of high figures of merit (piezoelectric constants (d33), piezoelectric stress constants (e33), elastic constants (C33), piezoelectric output constants (g33) and electromechanical coupling constants (k2), and a piezoelectric material comprising the same, and an MEMS device comprising the piezoelectric material.SOLUTION: The present disclosure provides a nitride material represented by chemical formula Al1-XYbXN, where the value of X is 0.60 or more and 1.00 or less.SELECTED DRAWING: Figure 5
【課題】高い性能指数（圧電定数（ｄ３３）、圧電応力定数（ｅ３３）、弾性定数（Ｃ３３）、圧電出力定数（ｇ３３）および電気機械結合定数（ｋ２）の少なくとも何れか１つ）の値を有する窒化物材料およびそれからなる圧電体並びにその圧電体を用いたＭＥＭＳデバイスを提供する。【解決手段】化学式Ａｌ１−ＸＹｂＸＮで表され、Ｘの値が０．６０以上で１．００以下の範囲にある。【選択図】図５
NITRIDE MATERIAL AND PIEZOELECTRIC MATERIAL COMPRISING THE SAME, AND MEMS DEVICE COMPRISING PIEZOELECTRIC MATERIAL
窒化物材料およびそれからなる圧電体並びにその圧電体を用いたＭＥＭＳデバイス
HIRATA KENJI (author) / UEHARA MASAHITO (author) / YAMADA HIROSHI (author) / ANGGRAINI SRI AYU (author) / AKIYAMA MORIHITO (author)
2021-09-13
Patent
Electronic Resource
Japanese
| European Patent Office | 2021
| European Patent Office | 2023
| European Patent Office | 2018