A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
HOLDING MEMBER AND MANUFACTURING METHOD THEREOF
To provide a holding member and a manufacturing method thereof capable of exerting strong electrostatic adsorption force on a processing target by reducing the volume low efficiency of a surface layer.SOLUTION: A plate-shaped holding member 100 that is integrally formed and holds an object to be processed on the surface includes a surface layer 110 and a bulk layer 120 formed of a ceramic sintered body containing AlN as a main component, and an electrode 150 provided between the surface layer 110 and the bulk layer 120, and the surface layer 110 contains YAG particles, and does not contain YAP particles and YAM particles at the AlN grain boundary of the ceramic sintered body. As a result, the volume resistivity of the surface layer 110 is lowered as compared with a case in which YAP particles or YAM particles are contained, and strong electrostatic adsorption force can be exerted on the object to be processed.SELECTED DRAWING: Figure 1
【課題】表面層の体積低効率が低下し、処理対象に対し強い静電吸着力を発揮できる保持部材およびその製造方法を提供する。【解決手段】一体に形成され、処理対象を表面上に保持する板状の保持部材１００であって、ＡｌＮを主成分とするセラミック焼結体で形成された表面層１１０およびバルク層１２０と、表面層１１０とバルク層１２０との間に設けられた電極１５０と、を備え、表面層１１０は、セラミック焼結体のＡｌＮ粒界にＹＡＧ粒子が含まれ、ＹＡＰ粒子およびＹＡＭ粒子が含まれない。これにより、ＹＡＰ粒子またはＹＡＭ粒子が含まれる場合に比べて表面層１１０の体積抵抗率が低下し、処理対象に対し強い静電吸着力を発揮できる。【選択図】図１
HOLDING MEMBER AND MANUFACTURING METHOD THEREOF
To provide a holding member and a manufacturing method thereof capable of exerting strong electrostatic adsorption force on a processing target by reducing the volume low efficiency of a surface layer.SOLUTION: A plate-shaped holding member 100 that is integrally formed and holds an object to be processed on the surface includes a surface layer 110 and a bulk layer 120 formed of a ceramic sintered body containing AlN as a main component, and an electrode 150 provided between the surface layer 110 and the bulk layer 120, and the surface layer 110 contains YAG particles, and does not contain YAP particles and YAM particles at the AlN grain boundary of the ceramic sintered body. As a result, the volume resistivity of the surface layer 110 is lowered as compared with a case in which YAP particles or YAM particles are contained, and strong electrostatic adsorption force can be exerted on the object to be processed.SELECTED DRAWING: Figure 1
【課題】表面層の体積低効率が低下し、処理対象に対し強い静電吸着力を発揮できる保持部材およびその製造方法を提供する。【解決手段】一体に形成され、処理対象を表面上に保持する板状の保持部材１００であって、ＡｌＮを主成分とするセラミック焼結体で形成された表面層１１０およびバルク層１２０と、表面層１１０とバルク層１２０との間に設けられた電極１５０と、を備え、表面層１１０は、セラミック焼結体のＡｌＮ粒界にＹＡＧ粒子が含まれ、ＹＡＰ粒子およびＹＡＭ粒子が含まれない。これにより、ＹＡＰ粒子またはＹＡＭ粒子が含まれる場合に比べて表面層１１０の体積抵抗率が低下し、処理対象に対し強い静電吸着力を発揮できる。【選択図】図１
HOLDING MEMBER AND MANUFACTURING METHOD THEREOF
保持部材およびその製造方法
NARUSE NORIYUKI (author) / SUZUKI HIROAKI (author)
2021-09-24
Patent
Electronic Resource
Japanese
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