A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
SUBSTRATE HOLDING MEMBER AND MANUFACTURING METHOD THEREOF
To provide a substrate holding member and a manufacturing method thereof that can reduce the risk of damage due to poor joining between a substrate holding member main body and a support member.SOLUTION: A substrate holding member includes a substrate holding member main body, an electrode, and a support member. The substrate holding member main body is formed of a first region and a second region, the first region constitutes at least a part of a mounting surface of the substrate holding member main body, and the second region constitutes at least a joining portion with the support member of the substrate holding member main body. A Y2O3 conversion concentration of a Y component contained in the first region and a Y2O3 conversion concentration of a Y component contained in the second region are different from each other, the Y2O3 conversion concentration of the Y component contained in the second region and the support member is 0 wt% or more and 1.5 wt% or less, and a difference between the Y2O3 conversion concentration of the Y component contained in the second region and the Y2O3 conversion concentration of the Y component contained in the support member is 0 wt% or more and 1.0 wt% or less.SELECTED DRAWING: Figure 1
【課題】基板保持部材本体と支持部材との接合不良による破損の虞を低減させることができる基板保持部材、およびその製造方法を提供する。【解決手段】基板保持部材本体と、電極と、支持部材と、を備え、基板保持部材本体は、第１の領域および第２の領域で形成され、第１の領域は、少なくとも基板保持部材本体の載置面の一部を構成し、第２の領域は、少なくとも基板保持部材本体の支持部材との接合部を構成し、第１の領域に含まれるＹ成分のＹ２Ｏ３換算濃度と第２の領域に含まれるＹ成分のＹ２Ｏ３換算濃度とは異なり、第２の領域および支持部材に含まれるＹ成分のＹ２Ｏ３換算濃度は０ｗｔ％以上１．５ｗｔ％以下であり、第２の領域に含まれるＹ成分のＹ２Ｏ３換算濃度と支持部材に含まれるＹ成分のＹ２Ｏ３換算濃度との差は、０ｗｔ％以上１．０ｗｔ％以下である。【選択図】図１
SUBSTRATE HOLDING MEMBER AND MANUFACTURING METHOD THEREOF
To provide a substrate holding member and a manufacturing method thereof that can reduce the risk of damage due to poor joining between a substrate holding member main body and a support member.SOLUTION: A substrate holding member includes a substrate holding member main body, an electrode, and a support member. The substrate holding member main body is formed of a first region and a second region, the first region constitutes at least a part of a mounting surface of the substrate holding member main body, and the second region constitutes at least a joining portion with the support member of the substrate holding member main body. A Y2O3 conversion concentration of a Y component contained in the first region and a Y2O3 conversion concentration of a Y component contained in the second region are different from each other, the Y2O3 conversion concentration of the Y component contained in the second region and the support member is 0 wt% or more and 1.5 wt% or less, and a difference between the Y2O3 conversion concentration of the Y component contained in the second region and the Y2O3 conversion concentration of the Y component contained in the support member is 0 wt% or more and 1.0 wt% or less.SELECTED DRAWING: Figure 1
【課題】基板保持部材本体と支持部材との接合不良による破損の虞を低減させることができる基板保持部材、およびその製造方法を提供する。【解決手段】基板保持部材本体と、電極と、支持部材と、を備え、基板保持部材本体は、第１の領域および第２の領域で形成され、第１の領域は、少なくとも基板保持部材本体の載置面の一部を構成し、第２の領域は、少なくとも基板保持部材本体の支持部材との接合部を構成し、第１の領域に含まれるＹ成分のＹ２Ｏ３換算濃度と第２の領域に含まれるＹ成分のＹ２Ｏ３換算濃度とは異なり、第２の領域および支持部材に含まれるＹ成分のＹ２Ｏ３換算濃度は０ｗｔ％以上１．５ｗｔ％以下であり、第２の領域に含まれるＹ成分のＹ２Ｏ３換算濃度と支持部材に含まれるＹ成分のＹ２Ｏ３換算濃度との差は、０ｗｔ％以上１．０ｗｔ％以下である。【選択図】図１
SUBSTRATE HOLDING MEMBER AND MANUFACTURING METHOD THEREOF
基板保持部材、およびその製造方法
SEKIYA SHUSUKE (author) / YABUHANA MASAKI (author)
2022-04-08
Patent
Electronic Resource
Japanese
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