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A platform for research: civil engineering, architecture and urbanism
SiC-COATED GRAPHITE MEMBER BONDED BODY AND MANUFACTURING METHOD THEREOF
To provide a SiC-coated graphite member bonded body having high dimensional accuracy and no gaps, in which a plurality of graphite substrates are combined via CVD-SiC layers.SOLUTION: The bonded body of a SiC-coated graphite member is made up of a plurality of plate-shaped graphite substrates laminated so that their main surfaces face each other, in which each of the plurality of plate-shaped graphite substrates is coated with the CVD-SiC layer and is bonded to each other, in which the CVD-SiC layer is composed of a thick portion located on a side surface of the graphite substrates and a thin portion located on two main surfaces of the graphite substrates, the thin portions on the surface of the graphite substrates that face each other are in contact with each other without being bonded to each other, and the thick portions bond the graphite substrates to each other.SELECTED DRAWING: Figure 1
【課題】寸法精度が高く、隙間の発生のない、複数の黒鉛基材をＣＶＤ−ＳｉＣ層を介して組み合わせたＳｉＣ被覆黒鉛部材の接合体を提供する。【解決手段】板状の黒鉛基材が、主面同士が対向するように複数積層され、複数の前記黒鉛基材がそれぞれＣＶＤ−ＳｉＣ層によって被覆されるとともに互いに接合された板状のＳｉＣ被覆黒鉛部材の接合体であって、前記ＣＶＤ−ＳｉＣ層は、前記黒鉛基材の側面に位置する厚肉部と、前記黒鉛基材の２つの主面に位置する薄肉部とからなり、対向する前記黒鉛基材の表面の薄肉部は互いに接合することなく接触し、前記厚肉部が互いに前記黒鉛基材を接合していることを特徴とするＳｉＣ被覆黒鉛部材の接合体。【選択図】 図１
SiC-COATED GRAPHITE MEMBER BONDED BODY AND MANUFACTURING METHOD THEREOF
To provide a SiC-coated graphite member bonded body having high dimensional accuracy and no gaps, in which a plurality of graphite substrates are combined via CVD-SiC layers.SOLUTION: The bonded body of a SiC-coated graphite member is made up of a plurality of plate-shaped graphite substrates laminated so that their main surfaces face each other, in which each of the plurality of plate-shaped graphite substrates is coated with the CVD-SiC layer and is bonded to each other, in which the CVD-SiC layer is composed of a thick portion located on a side surface of the graphite substrates and a thin portion located on two main surfaces of the graphite substrates, the thin portions on the surface of the graphite substrates that face each other are in contact with each other without being bonded to each other, and the thick portions bond the graphite substrates to each other.SELECTED DRAWING: Figure 1
【課題】寸法精度が高く、隙間の発生のない、複数の黒鉛基材をＣＶＤ−ＳｉＣ層を介して組み合わせたＳｉＣ被覆黒鉛部材の接合体を提供する。【解決手段】板状の黒鉛基材が、主面同士が対向するように複数積層され、複数の前記黒鉛基材がそれぞれＣＶＤ−ＳｉＣ層によって被覆されるとともに互いに接合された板状のＳｉＣ被覆黒鉛部材の接合体であって、前記ＣＶＤ−ＳｉＣ層は、前記黒鉛基材の側面に位置する厚肉部と、前記黒鉛基材の２つの主面に位置する薄肉部とからなり、対向する前記黒鉛基材の表面の薄肉部は互いに接合することなく接触し、前記厚肉部が互いに前記黒鉛基材を接合していることを特徴とするＳｉＣ被覆黒鉛部材の接合体。【選択図】 図１
SiC-COATED GRAPHITE MEMBER BONDED BODY AND MANUFACTURING METHOD THEREOF
ＳｉＣ被覆黒鉛部材の接合体及びその製造方法
HORIO SACHIKA (author) / NOMURA MADOKA (author) / HIGUCHI NAOKI (author)
2021-11-01
Patent
Electronic Resource
Japanese
| European Patent Office | 2015
BONDED BODY MANUFACTURING METHOD AND BONDED BODY MANUFACTURING DEVICE
| European Patent Office | 2021