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A platform for research: civil engineering, architecture and urbanism
ION ASSISTED DEPOSITION FOR RARE-EARTH OXIDE BASED COATINGS ON LIDS AND NOZZLES
To provide an article (such as a lid and/or nozzle) for an etch reactor having a thin film protective layer on one or more plasma facing surfaces of the article.SOLUTION: A method of manufacturing an article comprises the step for providing a lid or nozzle for an etch reactor. Ion assisted deposition (IAD) is then performed to deposit a protective layer on at least one surface of the lid or nozzle, where the protective layer is a plasma resistant rare earth oxide film having a thickness of less than 300 μm and an average surface roughness of 10 micro-inches or less.SELECTED DRAWING: Figure 6
【課題】物品の１以上のプラズマ対向面上に薄膜保護層を有するエッチングリアクタ用の物品（例えば、蓋及び／又はノズル）を提供する。【解決手段】物品の製造方法は、エッチングリアクタ用の蓋又はノズルを提供する工程を含む。その後、蓋又はノズルの少なくとも１つの表面上に保護層を堆積させるために、イオンアシスト蒸着（ＩＡＤ）が実行され、保護層は、３００μｍ未満の厚さと、１０マイクロインチ以下の平均表面粗さを有する耐プラズマ性の希土類酸化物膜である。【選択図】図６
ION ASSISTED DEPOSITION FOR RARE-EARTH OXIDE BASED COATINGS ON LIDS AND NOZZLES
To provide an article (such as a lid and/or nozzle) for an etch reactor having a thin film protective layer on one or more plasma facing surfaces of the article.SOLUTION: A method of manufacturing an article comprises the step for providing a lid or nozzle for an etch reactor. Ion assisted deposition (IAD) is then performed to deposit a protective layer on at least one surface of the lid or nozzle, where the protective layer is a plasma resistant rare earth oxide film having a thickness of less than 300 μm and an average surface roughness of 10 micro-inches or less.SELECTED DRAWING: Figure 6
【課題】物品の１以上のプラズマ対向面上に薄膜保護層を有するエッチングリアクタ用の物品（例えば、蓋及び／又はノズル）を提供する。【解決手段】物品の製造方法は、エッチングリアクタ用の蓋又はノズルを提供する工程を含む。その後、蓋又はノズルの少なくとも１つの表面上に保護層を堆積させるために、イオンアシスト蒸着（ＩＡＤ）が実行され、保護層は、３００μｍ未満の厚さと、１０マイクロインチ以下の平均表面粗さを有する耐プラズマ性の希土類酸化物膜である。【選択図】図６
ION ASSISTED DEPOSITION FOR RARE-EARTH OXIDE BASED COATINGS ON LIDS AND NOZZLES
蓋及びノズル上の希土類酸化物系コーティング用イオンアシスト蒸着
JENNIFER Y SUN (author) / BIRAJA P KANUNGO (author) / VAHID FIROUZDOR (author) / ZHANG YING (author)
2021-12-09
Patent
Electronic Resource
Japanese
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