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To provide a dielectric for an electrostatic chuck capable of ensuring sufficient hardness while ensuring basic characteristics such as volume resistivity and the like required for a Johnsen-Rahbek type dielectric for the electrostatic chuck.SOLUTION: The present invention provides the dielectric for the electrostatic chuck, in which a main crystal phase consists of corundum, Al5BO9 is contained as an other crystal phase, and Ratio:IA/IB is 0.04 or more and 0.4 or less, where IA is a (021 plane) peak intensity of the Al5BO9 and IB is a (012 surface) peak intensity of the corundum, by powder X-ray diffraction.SELECTED DRAWING: Figure 1
【課題】ジョンセン・ラーベック型の静電チャック用誘電体に要求される体積固有抵抗率等の基本特性を確保しつつ、十分な硬度を確保できる静電チャック用誘電体を提供する。【解決手段】主結晶相がコランダムからなり、その他の結晶相としてＡｌ５ＢＯ９を含み、粉末Ｘ線回折によるＡｌ５ＢＯ９の（０２１面）ピーク強度：ＩＡとコランダムの（０１２面）ピーク強度：ＩＢとの比：ＩＡ／ＩＢが、０．０４以上０．４以下である、静電チャック用誘電体。【選択図】図１
To provide a dielectric for an electrostatic chuck capable of ensuring sufficient hardness while ensuring basic characteristics such as volume resistivity and the like required for a Johnsen-Rahbek type dielectric for the electrostatic chuck.SOLUTION: The present invention provides the dielectric for the electrostatic chuck, in which a main crystal phase consists of corundum, Al5BO9 is contained as an other crystal phase, and Ratio:IA/IB is 0.04 or more and 0.4 or less, where IA is a (021 plane) peak intensity of the Al5BO9 and IB is a (012 surface) peak intensity of the corundum, by powder X-ray diffraction.SELECTED DRAWING: Figure 1
【課題】ジョンセン・ラーベック型の静電チャック用誘電体に要求される体積固有抵抗率等の基本特性を確保しつつ、十分な硬度を確保できる静電チャック用誘電体を提供する。【解決手段】主結晶相がコランダムからなり、その他の結晶相としてＡｌ５ＢＯ９を含み、粉末Ｘ線回折によるＡｌ５ＢＯ９の（０２１面）ピーク強度：ＩＡとコランダムの（０１２面）ピーク強度：ＩＢとの比：ＩＡ／ＩＢが、０．０４以上０．４以下である、静電チャック用誘電体。【選択図】図１
DIELECTRIC FOR ELECTROSTATIC CHUCK
静電チャック用誘電体
HATTORI KENSAKU (author)
2021-12-13
Patent
Electronic Resource
Japanese
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