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Provided is a dielectric for an electrostatic chuck, which is capable of ensuring sufficient hardness, while ensuring basic properties, such as intrinsic volume resistivity, required for a dielectric for a Johnson-Rahbek type electrostatic chuck. The dielectric has a main crystal phase consisting of corundum, wherein the dielectric includes Al5BO9 as another crystal phase, and wherein a ratio IA/IB, where IA denotes a (021) peak intensity of Al5BO9 as measured by powder X-ray diffraction, and IB denotes a (012) peak intensity of corundum as measured by powder X-ray diffraction, is in the range of 0.04 to 0.4.
Provided is a dielectric for an electrostatic chuck, which is capable of ensuring sufficient hardness, while ensuring basic properties, such as intrinsic volume resistivity, required for a dielectric for a Johnson-Rahbek type electrostatic chuck. The dielectric has a main crystal phase consisting of corundum, wherein the dielectric includes Al5BO9 as another crystal phase, and wherein a ratio IA/IB, where IA denotes a (021) peak intensity of Al5BO9 as measured by powder X-ray diffraction, and IB denotes a (012) peak intensity of corundum as measured by powder X-ray diffraction, is in the range of 0.04 to 0.4.
DIELECTRIC FOR ELECTROSTATIC CHUCK
HATTORI KENSAKU (author)
2023-05-18
Patent
Electronic Resource
English
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