A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
JOINED BODY OF YTTRIUM OXYFLUORIDE SINTERED BODIES AND METHOD OF MANUFACTURING JOINED BODY OF YTTRIUM OXYFLUORIDE SINTERED BODIES
To provide a joined body of yttrium oxyfluoride sintered bodies and a method for manufacturing a joined body of yttrium oxyfluoride sintered bodies so as to provide a yttrium oxyfluoride sintered body even in a complicated shape.SOLUTION: Provided is a joined body of yttrium oxyfluoride sintered bodies composed of a first region and a second region opposing the first region and sandwiching an interface region. The interface region has a higher porosity than the first region and the second region.SELECTED DRAWING: Figure 3
【課題】複雑な形状でも、オキシフッ化イットリウム焼結体を提供できるようオキシフッ化イットリウム焼結体の接合体、及び、オキシフッ化イットリウム焼結体の接合体の製造方法を提供する。【解決手段】第１領域と、上記第１領域と界面領域を挟み対向する第２領域と、からなるオキシフッ化イットリウム焼結体の接合体であって、上記界面領域は、上記第１領域及び前記第２領域よりも気孔率が高いことを特徴とするオキシフッ化イットリウム焼結体の接合体。【選択図】図３
JOINED BODY OF YTTRIUM OXYFLUORIDE SINTERED BODIES AND METHOD OF MANUFACTURING JOINED BODY OF YTTRIUM OXYFLUORIDE SINTERED BODIES
To provide a joined body of yttrium oxyfluoride sintered bodies and a method for manufacturing a joined body of yttrium oxyfluoride sintered bodies so as to provide a yttrium oxyfluoride sintered body even in a complicated shape.SOLUTION: Provided is a joined body of yttrium oxyfluoride sintered bodies composed of a first region and a second region opposing the first region and sandwiching an interface region. The interface region has a higher porosity than the first region and the second region.SELECTED DRAWING: Figure 3
【課題】複雑な形状でも、オキシフッ化イットリウム焼結体を提供できるようオキシフッ化イットリウム焼結体の接合体、及び、オキシフッ化イットリウム焼結体の接合体の製造方法を提供する。【解決手段】第１領域と、上記第１領域と界面領域を挟み対向する第２領域と、からなるオキシフッ化イットリウム焼結体の接合体であって、上記界面領域は、上記第１領域及び前記第２領域よりも気孔率が高いことを特徴とするオキシフッ化イットリウム焼結体の接合体。【選択図】図３
JOINED BODY OF YTTRIUM OXYFLUORIDE SINTERED BODIES AND METHOD OF MANUFACTURING JOINED BODY OF YTTRIUM OXYFLUORIDE SINTERED BODIES
オキシフッ化イットリウム焼結体の接合体及びオキシフッ化イットリウム焼結体の接合体の製造方法
SATO EMIKO (author) / ITO YASUTAKA (author)
2023-01-20
Patent
Electronic Resource
Japanese
IPC:
C04B
Kalk
,
LIME
| European Patent Office | 2022
European Patent Office | 2023
| European Patent Office | 2019
| European Patent Office | 2017
SINTERED COMPACT OF YTTRIUM OXYFLUORIDE AND SEMICONDUCTOR MANUFACTURING DEVICE MEMBER USING THE SAME
| European Patent Office | 2022