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COPPER/CERAMIC JOINED BODY, AND INSULATED CIRCUIT BOARD
To provide a copper/ceramic joined body that can suppress the occurrence of crack in the ceramic member even when a severe thermal cycle is applied, and has excellent thermal cycle reliability.SOLUTION: Provided is a copper/ceramic joined body 10 which is formed by joining copper members 12 and 13 made of copper or a copper alloy, and a ceramic member 11, and in which, at a joint interface between the ceramic member 11 and the copper members 12, 13, an active metal compound layer 21 is formed on the ceramic member 11 side, and, in a field of view extending for 200 μm in a width direction of the joint interface in a cross section along a direction of lamination between the ceramic member 11 and the copper members 12 and 13, and extending for 10 μm from the surface of the active metal compound layer 21 toward the copper members 12 and 13 side, an area A of the active metal-containing precipitate is 360 μm2 or less, and a ratio A/B between the area A of the active metal-containing precipitate and an area B of an Ag-enriched phase having an Ag concentration of 10 atm % or more is within a range of 0.03 or more and 0.8 or less.SELECTED DRAWING: Figure 2
【課題】厳しい冷熱サイクルを負荷した場合であっても、セラミックス部材における割れの発生を抑制でき、冷熱サイクル信頼性に優れた銅/セラミックス接合体を提供する。【解決手段】銅又は銅合金からなる銅部材12,13と、セラミックス部材11とが接合されてなる銅/セラミックス接合体10であって、セラミックス部材11と銅部材12,13との接合界面において、セラミックス部材11側には活性金属化合物層21が形成されており、セラミックス部材11と銅部材12,13との積層方向に沿った断面における接合界面の幅方向に200μmおよび活性金属化合物層21の表面から銅部材12,13側へ10μmの視野において、活性金属含有析出物の面積Aが360μm2以下とされるとともに、活性金属含有析出物の面積AとAg濃度が10原子%以上であるAg濃化相の面積Bとの比A/Bが0.03以上0.8以下の範囲内とされている。【選択図】図2
COPPER/CERAMIC JOINED BODY, AND INSULATED CIRCUIT BOARD
To provide a copper/ceramic joined body that can suppress the occurrence of crack in the ceramic member even when a severe thermal cycle is applied, and has excellent thermal cycle reliability.SOLUTION: Provided is a copper/ceramic joined body 10 which is formed by joining copper members 12 and 13 made of copper or a copper alloy, and a ceramic member 11, and in which, at a joint interface between the ceramic member 11 and the copper members 12, 13, an active metal compound layer 21 is formed on the ceramic member 11 side, and, in a field of view extending for 200 μm in a width direction of the joint interface in a cross section along a direction of lamination between the ceramic member 11 and the copper members 12 and 13, and extending for 10 μm from the surface of the active metal compound layer 21 toward the copper members 12 and 13 side, an area A of the active metal-containing precipitate is 360 μm2 or less, and a ratio A/B between the area A of the active metal-containing precipitate and an area B of an Ag-enriched phase having an Ag concentration of 10 atm % or more is within a range of 0.03 or more and 0.8 or less.SELECTED DRAWING: Figure 2
【課題】厳しい冷熱サイクルを負荷した場合であっても、セラミックス部材における割れの発生を抑制でき、冷熱サイクル信頼性に優れた銅/セラミックス接合体を提供する。【解決手段】銅又は銅合金からなる銅部材12,13と、セラミックス部材11とが接合されてなる銅/セラミックス接合体10であって、セラミックス部材11と銅部材12,13との接合界面において、セラミックス部材11側には活性金属化合物層21が形成されており、セラミックス部材11と銅部材12,13との積層方向に沿った断面における接合界面の幅方向に200μmおよび活性金属化合物層21の表面から銅部材12,13側へ10μmの視野において、活性金属含有析出物の面積Aが360μm2以下とされるとともに、活性金属含有析出物の面積AとAg濃度が10原子%以上であるAg濃化相の面積Bとの比A/Bが0.03以上0.8以下の範囲内とされている。【選択図】図2
COPPER/CERAMIC JOINED BODY, AND INSULATED CIRCUIT BOARD
銅/セラミックス接合体、および、絶縁回路基板
TERASAKI NOBUYUKI (author)
2023-01-26
Patent
Electronic Resource
Japanese