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EVALUATION METHOD OF SILICON RAW MATERIAL POWDER FOR SILICON NITRIDE SUBSTRATE, EVALUATION DEVICE OF SILICON RAW MATERIAL POWDER FOR SILICON NITRIDE SUBSTRATE, AND EVALUATION SYSTEM OF SILICON RAW MATERIAL POWDER FOR SILICON NITRIDE SUBSTRATE
To provide an evaluation method of silicon raw material powder for silicon nitride substrate, capable of evaluating whether silicon raw material powder is likely to generate irregularities on the surface of a silicon nitride substrate.SOLUTION: The evaluation method of silicon raw material powder for silicon nitride substrate includes: obtaining Raman spectra at a plurality of measurement points of a silicon raw material powder for silicon nitride substrate; calculating on the basis of the Raman spectra obtained at the plurality of measurement points, an evaluation value representing peak size or magnitude relation of the number of peaks between a first peak belonging to lattice vibration of silicon and a second peak belonging to lattice vibration of silicon oxide; and evaluating the silicon raw material powder for silicon nitride substrate on the basis of the evaluation value.SELECTED DRAWING: Figure 5
【課題】シリコン原料粉末が窒化珪素基板の表面に凹凸を発生させ易いものであるか否かを評価することができる窒化珪素基板用シリコン原料粉末の評価方法等を提供すること。【解決手段】窒化珪素基板用シリコン原料粉末の評価方法では、窒化珪素基板用シリコン原料粉末の複数の測定点においてそれぞれラマンスペクトルを取得し、前記複数の測定点で取得されたラマンスペクトルに基づき、シリコンの格子振動に帰属される第１ピークと、酸化シリコンの格子振動に帰属される第２ピークとの間での、ピークの大きさ又はピークの数の大小関係を表す評価値を算出し、前記評価値に基づき、窒化珪素基板用シリコン原料粉末を評価する。【選択図】図５
EVALUATION METHOD OF SILICON RAW MATERIAL POWDER FOR SILICON NITRIDE SUBSTRATE, EVALUATION DEVICE OF SILICON RAW MATERIAL POWDER FOR SILICON NITRIDE SUBSTRATE, AND EVALUATION SYSTEM OF SILICON RAW MATERIAL POWDER FOR SILICON NITRIDE SUBSTRATE
To provide an evaluation method of silicon raw material powder for silicon nitride substrate, capable of evaluating whether silicon raw material powder is likely to generate irregularities on the surface of a silicon nitride substrate.SOLUTION: The evaluation method of silicon raw material powder for silicon nitride substrate includes: obtaining Raman spectra at a plurality of measurement points of a silicon raw material powder for silicon nitride substrate; calculating on the basis of the Raman spectra obtained at the plurality of measurement points, an evaluation value representing peak size or magnitude relation of the number of peaks between a first peak belonging to lattice vibration of silicon and a second peak belonging to lattice vibration of silicon oxide; and evaluating the silicon raw material powder for silicon nitride substrate on the basis of the evaluation value.SELECTED DRAWING: Figure 5
【課題】シリコン原料粉末が窒化珪素基板の表面に凹凸を発生させ易いものであるか否かを評価することができる窒化珪素基板用シリコン原料粉末の評価方法等を提供すること。【解決手段】窒化珪素基板用シリコン原料粉末の評価方法では、窒化珪素基板用シリコン原料粉末の複数の測定点においてそれぞれラマンスペクトルを取得し、前記複数の測定点で取得されたラマンスペクトルに基づき、シリコンの格子振動に帰属される第１ピークと、酸化シリコンの格子振動に帰属される第２ピークとの間での、ピークの大きさ又はピークの数の大小関係を表す評価値を算出し、前記評価値に基づき、窒化珪素基板用シリコン原料粉末を評価する。【選択図】図５
EVALUATION METHOD OF SILICON RAW MATERIAL POWDER FOR SILICON NITRIDE SUBSTRATE, EVALUATION DEVICE OF SILICON RAW MATERIAL POWDER FOR SILICON NITRIDE SUBSTRATE, AND EVALUATION SYSTEM OF SILICON RAW MATERIAL POWDER FOR SILICON NITRIDE SUBSTRATE
窒化珪素基板用シリコン原料粉末の評価方法、窒化珪素基板用シリコン原料粉末の評価装置、及び窒化珪素基板用シリコン原料粉末の評価システム
SUENAGA KAZUFUMI (author)
2024-10-07
Patent
Electronic Resource
Japanese
European Patent Office | 2016
| European Patent Office | 2018
| European Patent Office | 2023