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SILICON NITRIDE SUBSTRATE EVALUATION METHOD, SILICON NITRIDE SUBSTRATE EVALUATION DEVICE, SILICON NITRIDE SUBSTRATE EVALUATION SYSTEM, SILICON NITRIDE SUBSTRATE MANUFACTURING METHOD, AND POWER MODULE MANUFACTURING METHOD
To provide a silicon nitride substrate evaluation method which allows for evaluating dispersibility of rare earth oxide particles in a pre-sintered silicon nitride substrate.SOLUTION: A silicon nitride substrate evaluation method is provided, comprising: acquiring a Raman spectrum at each of multiple locations in an evaluation region occupying at least a portion of a pre-sintered silicon nitride substrate containing a rare earth oxide; acquiring a distribution of peak intensities caused by lattice vibration of the rare earth oxide in the evaluation region from the Raman spectra acquired at the multiple locations; and evaluating dispersibility of the rare earth oxide particles in the evaluation region based on the distribution.SELECTED DRAWING: Figure 6
【課題】焼結前の窒化珪素基板において、希土類酸化物粒子の分散性を評価できる窒化珪素基板の評価方法等を提供すること。【解決手段】窒化珪素基板の評価方法である。希土類酸化物を含む焼結前の窒化珪素基板の少なくとも一部である評価領域における複数の場所でそれぞれラマンスペクトルを取得する。前記複数の場所で取得したラマンスペクトルに基づき、希土類酸化物の格子振動に起因するピークの強度の前記評価領域における分布を取得する。前記分布に基づき、前記評価領域における希土類酸化物粒子の分散性を評価する。【選択図】図６
SILICON NITRIDE SUBSTRATE EVALUATION METHOD, SILICON NITRIDE SUBSTRATE EVALUATION DEVICE, SILICON NITRIDE SUBSTRATE EVALUATION SYSTEM, SILICON NITRIDE SUBSTRATE MANUFACTURING METHOD, AND POWER MODULE MANUFACTURING METHOD
To provide a silicon nitride substrate evaluation method which allows for evaluating dispersibility of rare earth oxide particles in a pre-sintered silicon nitride substrate.SOLUTION: A silicon nitride substrate evaluation method is provided, comprising: acquiring a Raman spectrum at each of multiple locations in an evaluation region occupying at least a portion of a pre-sintered silicon nitride substrate containing a rare earth oxide; acquiring a distribution of peak intensities caused by lattice vibration of the rare earth oxide in the evaluation region from the Raman spectra acquired at the multiple locations; and evaluating dispersibility of the rare earth oxide particles in the evaluation region based on the distribution.SELECTED DRAWING: Figure 6
【課題】焼結前の窒化珪素基板において、希土類酸化物粒子の分散性を評価できる窒化珪素基板の評価方法等を提供すること。【解決手段】窒化珪素基板の評価方法である。希土類酸化物を含む焼結前の窒化珪素基板の少なくとも一部である評価領域における複数の場所でそれぞれラマンスペクトルを取得する。前記複数の場所で取得したラマンスペクトルに基づき、希土類酸化物の格子振動に起因するピークの強度の前記評価領域における分布を取得する。前記分布に基づき、前記評価領域における希土類酸化物粒子の分散性を評価する。【選択図】図６
SILICON NITRIDE SUBSTRATE EVALUATION METHOD, SILICON NITRIDE SUBSTRATE EVALUATION DEVICE, SILICON NITRIDE SUBSTRATE EVALUATION SYSTEM, SILICON NITRIDE SUBSTRATE MANUFACTURING METHOD, AND POWER MODULE MANUFACTURING METHOD
窒化珪素基板の評価方法、窒化珪素基板の評価装置、窒化珪素基板の評価システム、窒化珪素基板の製造方法、及びパワーモジュールの製造方法
SUENAGA KAZUFUMI (author) / CHIWATA NAOFUMI (author) / KAGA YOICHIRO (author)
2023-04-11
Patent
Electronic Resource
Japanese
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