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METHOD OF MANUFACTURING ALUMINUM NITRIDE BASIC MATERIAL BEING FORMED DIFFUSIOIN LAYER AND ALUMINUM NITRIDE BASIC MATERIAL THEREOF
The present invention relates to a preparation method of an aluminum nitride base material forming a diffusion reaction layer, and to the aluminum nitride base material. In the present invention, a primary diffusion reaction layer is formed by applying a diffusion medium on a coating layer formed on an aluminum nitride ceramic base material, and by heating the same to a predetermined temperature. Simultaneously, a new liquid is generated with the formation of the primary diffusion reaction layer, and is diffused into the aluminum nitride base material, thereby forming a secondary diffusion reaction layer on the aluminum nitride base material. A diffusion medium layer and the primary diffusion reaction layer are removed, and the secondary diffusion reaction layer is ultimately left on the aluminum nitride base material.
본 발명은 확산 반응층이 형성되는 질화알루미늄 모재 제조방법 및 그 질화알루미늄 모재에 관한 것이다. 본 발명은, 질화알루미늄 세라믹 모재 위에 형성된 코팅층 위에 확산 매개체를 도포하여 이를 소정 온도로 가열함에 따라 1차 확산 반응층이 형성됨과 동시에 새로운 액상이 생성되어 질화알루미늄 모재 내부로 확산됨으로써 질화알루미늄 모재 위에 2차 확산 반응층이 형성되도록 한 것이다. 본 발명은, 확산 매개체층과 1차 확산 반응층을 제거하여 최종적으로 질화알루미늄 모재 위에 2차 확산 반응층만 남겨두도록 한 것이다.
METHOD OF MANUFACTURING ALUMINUM NITRIDE BASIC MATERIAL BEING FORMED DIFFUSIOIN LAYER AND ALUMINUM NITRIDE BASIC MATERIAL THEREOF
The present invention relates to a preparation method of an aluminum nitride base material forming a diffusion reaction layer, and to the aluminum nitride base material. In the present invention, a primary diffusion reaction layer is formed by applying a diffusion medium on a coating layer formed on an aluminum nitride ceramic base material, and by heating the same to a predetermined temperature. Simultaneously, a new liquid is generated with the formation of the primary diffusion reaction layer, and is diffused into the aluminum nitride base material, thereby forming a secondary diffusion reaction layer on the aluminum nitride base material. A diffusion medium layer and the primary diffusion reaction layer are removed, and the secondary diffusion reaction layer is ultimately left on the aluminum nitride base material.
본 발명은 확산 반응층이 형성되는 질화알루미늄 모재 제조방법 및 그 질화알루미늄 모재에 관한 것이다. 본 발명은, 질화알루미늄 세라믹 모재 위에 형성된 코팅층 위에 확산 매개체를 도포하여 이를 소정 온도로 가열함에 따라 1차 확산 반응층이 형성됨과 동시에 새로운 액상이 생성되어 질화알루미늄 모재 내부로 확산됨으로써 질화알루미늄 모재 위에 2차 확산 반응층이 형성되도록 한 것이다. 본 발명은, 확산 매개체층과 1차 확산 반응층을 제거하여 최종적으로 질화알루미늄 모재 위에 2차 확산 반응층만 남겨두도록 한 것이다.
METHOD OF MANUFACTURING ALUMINUM NITRIDE BASIC MATERIAL BEING FORMED DIFFUSIOIN LAYER AND ALUMINUM NITRIDE BASIC MATERIAL THEREOF
확산 반응층이 형성되는 질화알루미늄 모재 제조방법 및 그 질화알루미늄 모재
KANG SEUNG DONG (author) / CHOI WON CHEL (author)
2017-01-06
Patent
Electronic Resource
Korean
IPC:
C04B
Kalk
,
LIME
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