A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
CERAMIC COMPOSITION FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK USING THE SAME
According to an embodiment of the present invention, an electrostatic chuck comprises a ceramic layer made of a ceramic composition comprising ceramic powder and conductive powder. The ceramic layer may comprise low specific resistance, thereby improving electrostatic adsorptive power of the electrostatic chuck.
본 개시의 일 실시 예에 따른 정전 척은 세라믹 분말 및 도전성 분말을 포함하는 세라믹 조성물로 형성된 세라믹층을 포함한다. 세라믹 층은 낮은 비저항을 가질 수 있으며, 이로 인해 정전 척의 정전 흡착력을 향상시킬 수 있다.
CERAMIC COMPOSITION FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK USING THE SAME
According to an embodiment of the present invention, an electrostatic chuck comprises a ceramic layer made of a ceramic composition comprising ceramic powder and conductive powder. The ceramic layer may comprise low specific resistance, thereby improving electrostatic adsorptive power of the electrostatic chuck.
본 개시의 일 실시 예에 따른 정전 척은 세라믹 분말 및 도전성 분말을 포함하는 세라믹 조성물로 형성된 세라믹층을 포함한다. 세라믹 층은 낮은 비저항을 가질 수 있으며, 이로 인해 정전 척의 정전 흡착력을 향상시킬 수 있다.
CERAMIC COMPOSITION FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK USING THE SAME
정전 척용 세라믹 조성물, 이를 이용한 정전 척
CHOO HO SUNG (author) / NA JI SUNG (author) / WOO SEOK KYOON (author)
2017-02-07
Patent
Electronic Resource
Korean
CERAMIC COMPOSITION FOR ELECTROSTATIC CHUCK, AND ELECTROSTATIC CHUCK USING THE SAME
| European Patent Office | 2017
CERAMIC COMPOSITION FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK USING THE SAME
European Patent Office | 2022
Ceramic Composition Electrostatic Chuck and Manufacturing Method of Electrostatic Chuck
European Patent Office | 2023
Ceramic Composition Electrostatic Chuck and Manufacturing Method of Electrostatic Chuck
| European Patent Office | 2017
CERAMIC SUBSTRATE, ELECTROSTATIC CHUCK, AND MANUFACTURING METHOD FOR ELECTROSTATIC CHUCK
| European Patent Office | 2021