A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
CERAMIC COMPOSITION FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK USING THE SAME
본 개시의 일 실시 예에 따른 정전 척은 세라믹 분말 및 도전성 분말을 포함하는 세라믹 조성물로 형성된 세라믹층을 포함한다. 세라믹 층은 낮은 비저항을 가질 수 있으며, 이로 인해 정전 척의 정전 흡착력을 향상시킬 수 있다.
According to an embodiment of the present invention, an electrostatic chuck comprises a ceramic layer made of a ceramic composition comprising ceramic powder and conductive powder. The ceramic layer may comprise low specific resistance, thereby improving electrostatic adsorptive power of the electrostatic chuck.
CERAMIC COMPOSITION FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK USING THE SAME
본 개시의 일 실시 예에 따른 정전 척은 세라믹 분말 및 도전성 분말을 포함하는 세라믹 조성물로 형성된 세라믹층을 포함한다. 세라믹 층은 낮은 비저항을 가질 수 있으며, 이로 인해 정전 척의 정전 흡착력을 향상시킬 수 있다.
According to an embodiment of the present invention, an electrostatic chuck comprises a ceramic layer made of a ceramic composition comprising ceramic powder and conductive powder. The ceramic layer may comprise low specific resistance, thereby improving electrostatic adsorptive power of the electrostatic chuck.
CERAMIC COMPOSITION FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK USING THE SAME
정전 척용 세라믹 조성물, 이를 이용한 정전 척
2022-05-02
Patent
Electronic Resource
Korean
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