A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
COMPOSITE STRUCTURE AND DISPLAY MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING DEVICE HAVING COMPOSITE STRUCTURE
The present invention provides a method of providing ceramic coating having excellent inner particle property and evaluating the inner particle property of the ceramic coating. A composite structure includes: a base material; and a structure installed on the base material and having a surface. The structure is formed by including polycrystal ceramics. The composite structure, in which brightness (Sa) calculated from TEM image interpretation satisfies a predetermined value, can be properly used as an inner member of a semiconductor manufacturing apparatus required for the inner particle property.
내파티클성이 우수한 세라믹 코팅의 제공 및 세라믹 코팅의 내파티클성을 평가하는 방법의 제공. 기재와, 상기 기재 상에 설치되고, 표면을 갖는 구조물을 포함하는 복합 구조물이며, 구조물이 다결정 세라믹스를 포함하여 이루어지고, 그 TEM 화상 해석으로부터 산출되는 휘도 Sa가 소정의 값을 만족시키는 복합 구조물은, 내파티클성이 요구되는 반도체 제조 장치의 내부 부재로서 적합하게 사용할 수 있다.
COMPOSITE STRUCTURE AND DISPLAY MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING DEVICE HAVING COMPOSITE STRUCTURE
The present invention provides a method of providing ceramic coating having excellent inner particle property and evaluating the inner particle property of the ceramic coating. A composite structure includes: a base material; and a structure installed on the base material and having a surface. The structure is formed by including polycrystal ceramics. The composite structure, in which brightness (Sa) calculated from TEM image interpretation satisfies a predetermined value, can be properly used as an inner member of a semiconductor manufacturing apparatus required for the inner particle property.
내파티클성이 우수한 세라믹 코팅의 제공 및 세라믹 코팅의 내파티클성을 평가하는 방법의 제공. 기재와, 상기 기재 상에 설치되고, 표면을 갖는 구조물을 포함하는 복합 구조물이며, 구조물이 다결정 세라믹스를 포함하여 이루어지고, 그 TEM 화상 해석으로부터 산출되는 휘도 Sa가 소정의 값을 만족시키는 복합 구조물은, 내파티클성이 요구되는 반도체 제조 장치의 내부 부재로서 적합하게 사용할 수 있다.
COMPOSITE STRUCTURE AND DISPLAY MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING DEVICE HAVING COMPOSITE STRUCTURE
복합 구조물 및 복합 구조물을 구비한 반도체 제조 장치 그리고 디스플레이 제조 장치
IWASAWA JUNICHI (author) / ASHIZAWA HIROAKI (author) / WADA TAKUMA (author) / TAKIZAWA RYOTO (author) / AOSHIMA TOSHIHIRO (author) / TAKAHASHI YUUKI (author) / KINJO ATSUSHI (author)
2019-09-18
Patent
Electronic Resource
Korean
IPC:
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
/
C01F
COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
,
Verbindungen der Metalle Beryllium, Magnesium, Aluminium, Calcium, Strontium, Barium, Radium, Thorium oder der Seltenen Erden
/
C04B
Kalk
,
LIME
/
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
/
G01N
Untersuchen oder Analysieren von Stoffen durch Bestimmen ihrer chemischen oder physikalischen Eigenschaften
,
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
| European Patent Office | 2020
European Patent Office | 2020
| European Patent Office | 2019
| European Patent Office | 2020
| European Patent Office | 2020