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A platform for research: civil engineering, architecture and urbanism
High-Resistance Silicon Carbide Product Forming Method and High-Resistance Silicon Carbide Product
The present invention relates to a method for forming high-resistance silicon carbide parts and the high-resistance silicon carbide parts. According to the present invention, a method includes: a preparation process for disposing a base part in a chamber; an exhaust process of exhausting a fluid in the chamber; and a deposition process of depositing a silicon carbide layer by injecting a reaction gas containing hydrogen and alkylsilane into the chamber using monoatomic molecules as a transport gas. Thus, a technique for obtaining high-resistance silicon carbide parts is disclosed.
본 발명은 고저항 탄화규소 부품 형성방법 및 고저항 탄화규소 부품에 관한 것으로, 본 발명에 따르면, 베이스부를 챔버 내에 배치시키는 준비과정; 상기 챔버 내의 유체를 배기시키는 배기과정; 및 단원자분자를 이송가스로 하여 수소와 알킬실란을 포함하는 반응가스를 챔버 내에 주입하여 탄화규소층을 증착시키는 증착과정;을 포함함으로써 고저항 탄화규소 부품을 얻을 수 있는 기술이 개시된다.
High-Resistance Silicon Carbide Product Forming Method and High-Resistance Silicon Carbide Product
The present invention relates to a method for forming high-resistance silicon carbide parts and the high-resistance silicon carbide parts. According to the present invention, a method includes: a preparation process for disposing a base part in a chamber; an exhaust process of exhausting a fluid in the chamber; and a deposition process of depositing a silicon carbide layer by injecting a reaction gas containing hydrogen and alkylsilane into the chamber using monoatomic molecules as a transport gas. Thus, a technique for obtaining high-resistance silicon carbide parts is disclosed.
본 발명은 고저항 탄화규소 부품 형성방법 및 고저항 탄화규소 부품에 관한 것으로, 본 발명에 따르면, 베이스부를 챔버 내에 배치시키는 준비과정; 상기 챔버 내의 유체를 배기시키는 배기과정; 및 단원자분자를 이송가스로 하여 수소와 알킬실란을 포함하는 반응가스를 챔버 내에 주입하여 탄화규소층을 증착시키는 증착과정;을 포함함으로써 고저항 탄화규소 부품을 얻을 수 있는 기술이 개시된다.
High-Resistance Silicon Carbide Product Forming Method and High-Resistance Silicon Carbide Product
고저항 탄화규소 부품 형성방법 및 고저항 탄화규소 부품
KIM KI SEONG (author) / YOO HYUN (author) / JEONG YOUN SU (author) / LEE SOCK WOO (author)
2022-05-24
Patent
Electronic Resource
Korean
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