A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
MOLYBDENUM OXIDE BASED SINTERED BODY METAL OXIDE THIN FILM USING THE SINTERED BODY AND THIN FILM TRANSISTORS AND DISPLA DEVICES COMPRISING THE THIN FILMS
The present invention provides a molybdenum oxide based sintered body with excellent low reflection, chemical resistance and heat resistance, a thin film using the sintered body, and a thin film transistor and a display device comprising the thin film. An oxide sintered body of the present invention comprises: a molybdenum oxide (M1) which includes MoO_2 and MoO_3; a first metal oxide (M2) which includes at least one first element selected from the group consisting of Nb, Ta, Zr, Ti, Sn, and W; a second metal oxide (M3) which includes at least one second element selected from the group consisting of In, Ga, Si, and Zn; and at least one metal (M4) which is selected from the group consisting of Mo, Ti, Cr, W, and Cu.
본 발명은 저반사, 내화학성 및 내열성이 우수한 몰리브덴 산화물계 소결체, 상기 소결체를 이용한 박막, 상기 박막을 포함하는 박막트랜지스터 및 디스플레이 장치를 제공한다.
MOLYBDENUM OXIDE BASED SINTERED BODY METAL OXIDE THIN FILM USING THE SINTERED BODY AND THIN FILM TRANSISTORS AND DISPLA DEVICES COMPRISING THE THIN FILMS
The present invention provides a molybdenum oxide based sintered body with excellent low reflection, chemical resistance and heat resistance, a thin film using the sintered body, and a thin film transistor and a display device comprising the thin film. An oxide sintered body of the present invention comprises: a molybdenum oxide (M1) which includes MoO_2 and MoO_3; a first metal oxide (M2) which includes at least one first element selected from the group consisting of Nb, Ta, Zr, Ti, Sn, and W; a second metal oxide (M3) which includes at least one second element selected from the group consisting of In, Ga, Si, and Zn; and at least one metal (M4) which is selected from the group consisting of Mo, Ti, Cr, W, and Cu.
본 발명은 저반사, 내화학성 및 내열성이 우수한 몰리브덴 산화물계 소결체, 상기 소결체를 이용한 박막, 상기 박막을 포함하는 박막트랜지스터 및 디스플레이 장치를 제공한다.
MOLYBDENUM OXIDE BASED SINTERED BODY METAL OXIDE THIN FILM USING THE SINTERED BODY AND THIN FILM TRANSISTORS AND DISPLA DEVICES COMPRISING THE THIN FILMS
몰리브덴 산화물계 소결체, 상기 소결체를 이용한 박막, 상기 박막을 포함하는 박막트랜지스터 및 디스플레이 장치
LEE HYOWON (author) / LEE SEUNGYI (author) / HWANG BYUNGJIN (author) / JANG BONGJUNG (author) / JEON BONGJUN (author) / JIN SEUNGHYEON (author) / YUN EUNSUB (author) / PARK JAESOUNG (author) / YANG SEUNGHO (author)
2023-04-13
Patent
Electronic Resource
Korean
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