A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Silicon carbide member for plasma processing apparatus
A silicon carbide member for a plasma processing apparatus is obtained by mixing an α-silicon carbide powder having an average particle size of 0.3 to 3 μm, with an amount of metal impurities in the α-silicon carbide powder reduced to 20 ppm or less, and a sintering aid comprising B4C in amount of 0.5 to 5 weight parts or Al2O3 and Y2O3 in total amount of 3 to 15 weight parts; sintering a mixture of the α-silicon carbide powder and the sintering aid in an argon atmosphere furnace or a high-frequency dielectric heating furnace; and then processing the resulting sintered body. The resulting silicon carbide member for a plasma processing apparatus is low cost and durable.
Silicon carbide member for plasma processing apparatus
A silicon carbide member for a plasma processing apparatus is obtained by mixing an α-silicon carbide powder having an average particle size of 0.3 to 3 μm, with an amount of metal impurities in the α-silicon carbide powder reduced to 20 ppm or less, and a sintering aid comprising B4C in amount of 0.5 to 5 weight parts or Al2O3 and Y2O3 in total amount of 3 to 15 weight parts; sintering a mixture of the α-silicon carbide powder and the sintering aid in an argon atmosphere furnace or a high-frequency dielectric heating furnace; and then processing the resulting sintered body. The resulting silicon carbide member for a plasma processing apparatus is low cost and durable.
Silicon carbide member for plasma processing apparatus
OKESAKU MASAHIRO (author) / MIYAHARA MICHITO (author) / ETO HIDEO (author) / OKUDO YUKIO (author) / SAITO MAKOTO (author) / SANDA HIROSHI (author)
2019-05-07
Patent
Electronic Resource
English
SILICON CARBIDE MEMBER FOR PLASMA PROCESSING APPARATUS, AND PRODUCTION METHOD THEREFOR
| European Patent Office | 2018
SILICON CARBIDE MEMBER FOR PLASMA TREATMENT APPARATUS, AND METHOD OF MANUFACTURING SAME
| European Patent Office | 2018