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Supporting substrate for composite substrate and composite substrate
A supporting substrate for a composite substrate comprises a ceramic and has a polished surface for use in bonding. An orientation degree of the ceramic forming the supporting substrate at the polished surface is 50% or higher, and an aspect ratio of each crystal grain included in the supporting substrate is 5.0 or less.
Supporting substrate for composite substrate and composite substrate
A supporting substrate for a composite substrate comprises a ceramic and has a polished surface for use in bonding. An orientation degree of the ceramic forming the supporting substrate at the polished surface is 50% or higher, and an aspect ratio of each crystal grain included in the supporting substrate is 5.0 or less.
Supporting substrate for composite substrate and composite substrate
YOSHIKAWA JUN (author) / ICHIMURA MIKIYA (author) / IMAI KATSUHIRO (author)
2019-06-25
Patent
Electronic Resource
English
IPC:
B32B
LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
,
Schichtkörper, d.h. aus Ebenen oder gewölbten Schichten, z.B. mit zell- oder wabenförmiger Form, aufgebaute Erzeugnisse
/
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
/
C04B
Kalk
,
LIME
/
H03H
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
,
Scheinwiderstandsnetzwerke, z.B. Resonanzkreise
/
H10N
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