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Flow path member and semiconductor module
A flow path member may include silicon nitride ceramics. The flow path member may have an inlet port, an outlet port, and a flow path connected to the inlet port and the outlet port inside the flow path member. A plurality of needle-shaped crystals may be arranged on a surface of the flow path where the needle-shaped crystals intersect each other.
Flow path member and semiconductor module
A flow path member may include silicon nitride ceramics. The flow path member may have an inlet port, an outlet port, and a flow path connected to the inlet port and the outlet port inside the flow path member. A plurality of needle-shaped crystals may be arranged on a surface of the flow path where the needle-shaped crystals intersect each other.
Flow path member and semiconductor module
ISHIMINE YUUSAKU (author) / MUNEISHI TAKESHI (author) / FUJIO KAZUHIKO (author) / FUKUDA YOSHIYUKI (author) / TAKANAMI KENTARO (author) / SHIRAI TAKAO (author)
2020-02-18
Patent
Electronic Resource
English
IPC:
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
/
C04B
Kalk
,
LIME
/
F28F
Einzelheiten von Wärmetauschern oder Wärmeübertragungsvorrichtungen für allgemeine Verwendung
,
DETAILS OF HEAT-EXCHANGE OR HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
/
H05K
PRINTED CIRCUITS
,
Gedruckte Schaltungen