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High-damping reinforced concrete (RC) lattice beam and substructure using same
An RC lattice beam is provided that can greatly dampen the transfer of vibrations in particular. As the concrete included in the RC lattice beam is polymer concrete that contains a polymer, fine-scale vibrations that may otherwise affect exposure apparatuses may be effectively dampened, while the depth of the conventional lattice beam may be kept the same. Thus, a high-damping RC lattice beam is provided that is capable of maximizing the performance of a precision exposure apparatus by reducing the defect rate and improving productivity.
High-damping reinforced concrete (RC) lattice beam and substructure using same
An RC lattice beam is provided that can greatly dampen the transfer of vibrations in particular. As the concrete included in the RC lattice beam is polymer concrete that contains a polymer, fine-scale vibrations that may otherwise affect exposure apparatuses may be effectively dampened, while the depth of the conventional lattice beam may be kept the same. Thus, a high-damping RC lattice beam is provided that is capable of maximizing the performance of a precision exposure apparatus by reducing the defect rate and improving productivity.
High-damping reinforced concrete (RC) lattice beam and substructure using same
PARK CHAN KYU (author) / AHN SANG KYUNG (author) / KIM YONG KU (author) / NOH HYUN SUP (author) / LEE EUN SEOK (author) / LEW YOUNG KEE (author) / JEON BYONG KAP (author) / JUNG JAE EUN (author)
2020-07-21
Patent
Electronic Resource
English
HIGH-DAMPING RC LATTICE BEAM AND HIGH-DAMPING RC LATTICE BEAM STRUCTURE USING SAME
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