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A platform for research: civil engineering, architecture and urbanism
RC RC High damping reinforced concrete grid beam and high damping reinforced concrete grid beam structure using it
The present invention relates to an RC lattice girder capable of specifically and greatly damping vibration transmission, and the objective of the present invention is to provide a high-damping RC lattice girder formed from polymer concrete by adding a polymer to concrete forming the RC lattice girder, so as to effectively dampen micro vibration affecting exposure equipment while maintaining the depth, as is, of a conventional lattice girder, thereby reducing a defect rate such that the productivity of semiconductors can be improved, and thus the performance of the precise exposure equipment is maximized.
본 발명은 특히 진동 전달이 대폭 감쇠될 수 있는 RC 격자보에 관한 것으로서, RC 격자보를 이루는 콘크리트가 폴리머가 첨가된 폴리머콘크리트로 이루어짐으로써, 종래의 격자보의 춤을 그대로 유지하면서도 노광장비에 미치는 미세진동을 효과적으로 감쇄시킬 수 있어, 불량률을 감소시킴으로써 반도체 생산성을 향상시킬 수 있게 되어 정밀한 노광장비의 성능을 극대화시키는 고감쇠 RC 격자보를 제공하고자 한다.
RC RC High damping reinforced concrete grid beam and high damping reinforced concrete grid beam structure using it
The present invention relates to an RC lattice girder capable of specifically and greatly damping vibration transmission, and the objective of the present invention is to provide a high-damping RC lattice girder formed from polymer concrete by adding a polymer to concrete forming the RC lattice girder, so as to effectively dampen micro vibration affecting exposure equipment while maintaining the depth, as is, of a conventional lattice girder, thereby reducing a defect rate such that the productivity of semiconductors can be improved, and thus the performance of the precise exposure equipment is maximized.
본 발명은 특히 진동 전달이 대폭 감쇠될 수 있는 RC 격자보에 관한 것으로서, RC 격자보를 이루는 콘크리트가 폴리머가 첨가된 폴리머콘크리트로 이루어짐으로써, 종래의 격자보의 춤을 그대로 유지하면서도 노광장비에 미치는 미세진동을 효과적으로 감쇄시킬 수 있어, 불량률을 감소시킴으로써 반도체 생산성을 향상시킬 수 있게 되어 정밀한 노광장비의 성능을 극대화시키는 고감쇠 RC 격자보를 제공하고자 한다.
RC RC High damping reinforced concrete grid beam and high damping reinforced concrete grid beam structure using it
고감쇠 RC 격자보 및 이를 이용한 고감쇠 RC 격자보 구조물
PARK CHAN KYU (author) / AHN SANG KYUNG (author) / KIM YONG KU (author) / NOH HYUN SUP (author) / LEE EUN SEOK (author) / LEW YOUNG KEE (author) / JEON BYONG KAP (author) / JUNG JAE EUN (author)
2019-05-09
Patent
Electronic Resource
Korean
IPC:
E04B
Allgemeine Baukonstruktionen
,
GENERAL BUILDING CONSTRUCTIONS
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