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A platform for research: civil engineering, architecture and urbanism
Ceramic material and electrostatic chuck device
Provided is a composite sintered body for an electrostatic chuck, which is not easily broken even if it is exposed to high-power plasma. Further, provided are an electrostatic chuck device using such a composite sintered body for an electrostatic chuck and a method of manufacturing a composite sintered body for an electrostatic chuck. The composite sintered body for an electrostatic chuck is a composite sintered body including an insulating ceramic and silicon carbide, in which crystal grains of the silicon carbide are dispersed in at least one selected from the group consisting of a crystal grain boundary and a crystal grain of a main phase formed by sintering crystal grains of the insulating ceramic.
Ceramic material and electrostatic chuck device
Provided is a composite sintered body for an electrostatic chuck, which is not easily broken even if it is exposed to high-power plasma. Further, provided are an electrostatic chuck device using such a composite sintered body for an electrostatic chuck and a method of manufacturing a composite sintered body for an electrostatic chuck. The composite sintered body for an electrostatic chuck is a composite sintered body including an insulating ceramic and silicon carbide, in which crystal grains of the silicon carbide are dispersed in at least one selected from the group consisting of a crystal grain boundary and a crystal grain of a main phase formed by sintering crystal grains of the insulating ceramic.
Ceramic material and electrostatic chuck device
YOSHIOKA YOSHIKI (author) / HIDAKA NOBUHIRO (author) / KUGIMOTO HIRONORI (author)
2022-07-12
Patent
Electronic Resource
English
Ceramic Composition Electrostatic Chuck and Manufacturing Method of Electrostatic Chuck
European Patent Office | 2023
Ceramic Composition Electrostatic Chuck and Manufacturing Method of Electrostatic Chuck
| European Patent Office | 2017