A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Ceramic structure for plasma processing apparatus and manufacturing method thereof
A ceramic structure including a first conductive structure embedded therein and a second conductive structure embedded at a different depth from the first conductive structure is disclosed. In the ceramic structure, the first conductive structure and the second conductive structure are electrically connected to each other by an electrically conductive connection member capable of compensating for a vertical shrinkage rate of a ceramic sheet shape while being embedded therein when sintering the ceramic structure.
Ceramic structure for plasma processing apparatus and manufacturing method thereof
A ceramic structure including a first conductive structure embedded therein and a second conductive structure embedded at a different depth from the first conductive structure is disclosed. In the ceramic structure, the first conductive structure and the second conductive structure are electrically connected to each other by an electrically conductive connection member capable of compensating for a vertical shrinkage rate of a ceramic sheet shape while being embedded therein when sintering the ceramic structure.
Ceramic structure for plasma processing apparatus and manufacturing method thereof
KIM JOO HWAN (author)
2022-09-27
Patent
Electronic Resource
English
CERAMIC STRUCTURE FOR PLASMA PROCESSING APPARATUS AND MANUFACTURING METHOD THEREOF
| European Patent Office | 2020
Ceramic composite for plasma processing apparatus and manufacturing mehtod thereof
| European Patent Office | 2018
PART FOR PLASMA PROCESSING APPARATUS, MANUFACTURING METHOD THEREOF, AND PLASMA PROCESSING APPARATUS
| European Patent Office | 2021
PART FOR PLASMA PROCESSING APPARATUS, MANUFACTURING METHOD THEREOF, AND PLASMA PROCESSING APPARATUS
| European Patent Office | 2022
CERAMIC STRUCTURE FOR MANUFACTURING APPARATUS OF SEMICONDUCTOR, AND MANUFACTURING METHOD THEREOF
| European Patent Office | 2021