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Oxide semiconductor film, thin film transistor, oxide sintered body, and sputtering target
An oxide semiconductor film contains In, Ga, and Sn at respective atomic ratios satisfying formulae (1) to (3): 0.01≤Ga/(In+Ga+Sn)≤0.30 . . . (1); 0.01≤Sn/(In+Ga+Sn)≤0.40 . . . (2); and 0.55≤In/(In+Ga+Sn)≤0.98 . . . (3), and Al at an atomic ratio satisfying a formula (4): 0.05≤Al/(In+Ga+Sn+Al)≤0.30 . . . (4).
Oxide semiconductor film, thin film transistor, oxide sintered body, and sputtering target
An oxide semiconductor film contains In, Ga, and Sn at respective atomic ratios satisfying formulae (1) to (3): 0.01≤Ga/(In+Ga+Sn)≤0.30 . . . (1); 0.01≤Sn/(In+Ga+Sn)≤0.40 . . . (2); and 0.55≤In/(In+Ga+Sn)≤0.98 . . . (3), and Al at an atomic ratio satisfying a formula (4): 0.05≤Al/(In+Ga+Sn+Al)≤0.30 . . . (4).
Oxide semiconductor film, thin film transistor, oxide sintered body, and sputtering target
INOUE KAZUYOSHI (author) / SHIBATA MASATOSHI (author)
2023-08-15
Patent
Electronic Resource
English
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