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Garnet compound, sintered body and sputtering target containing same
A garnet compound represented by a general formula (I):Ln3In2Ga3-XAlXO12 (I)(in the formula, Ln represents one or more metal elements selected from La, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu; and X satisfies an expression 0≤X<3).
Garnet compound, sintered body and sputtering target containing same
A garnet compound represented by a general formula (I):Ln3In2Ga3-XAlXO12 (I)(in the formula, Ln represents one or more metal elements selected from La, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu; and X satisfies an expression 0≤X<3).
Garnet compound, sintered body and sputtering target containing same
INOUE KAZUYOSHI (author) / TOMAI SHIGEKAZU (author) / SHIBATA MASATOSHI (author)
2024-05-21
Patent
Electronic Resource
English
IPC:
H01B
CABLES
,
Kabel
/
C01G
Verbindungen der von den Unterklassen C01D oder C01F nicht umfassten Metalle
,
COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
/
C04B
Kalk
,
LIME
/
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
/
H01J
Elektrische Entladungsröhren oder Entladungslampen
,
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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