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NEW GARNET COMPOUND, SINTERED BODY AND SPUTTERING TARGET CONTAINING SAME
A garnet compound represented by a general formula (I): Ln3In2Ga3-XAlXO12 (I) (in the formula, Ln represents one or more metal elements selected from La, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu; and X satisfies an expression 0≤X<3).
NEW GARNET COMPOUND, SINTERED BODY AND SPUTTERING TARGET CONTAINING SAME
A garnet compound represented by a general formula (I): Ln3In2Ga3-XAlXO12 (I) (in the formula, Ln represents one or more metal elements selected from La, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu; and X satisfies an expression 0≤X<3).
NEW GARNET COMPOUND, SINTERED BODY AND SPUTTERING TARGET CONTAINING SAME
INOUE KAZUYOSHI (author) / TOMAI SHIGEKAZU (author) / SHIBATA MASATOSHI (author)
2019-06-13
Patent
Electronic Resource
English
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