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    NOVEL GARNET COMPOUND, SINTERED BODY CONTAINING SAME, AND SPUTTERING TARGET

    New search for: INOUE KAZUYOSHI
    New search for: TOMAI SHIGEKAZU
    New search for: SHIBATA MASATOSHI

    A garnet compound represented by general formula (I) Ln3In2Ga3-XAlXO12. (In the formula, Ln represents one or more metal elements selected from among La, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu; and X satisfies 0 ≤ X < 3.)

    L'invention concerne un composé de grenat représenté par la formule générale (I) Ln3In2Ga3-XAlXO12. (Dans La formule, Ln représente un ou plusieurs éléments métalliques choisis parmi La, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb et Lu; et X satisfait 0 ≤ X < 3.)

    一般式（Ｉ）：　Ｌｎ３Ｉｎ２Ｇａ３－ＸＡｌＸＯ１２　（Ｉ）（式中、Ｌｎは、Ｌａ、Ｎｄ、Ｓｍ、Ｅｕ、Ｇｄ、Ｔｂ、Ｄｙ、Ｈｏ、Ｅｒ、Ｔｍ、Ｙｂ及びＬｕから選ばれた一種以上の金属元素を表す。Ｘは、０≦Ｘ＜３である。）で表されるガーネット化合物。

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    NOVEL GARNET COMPOUND, SINTERED BODY CONTAINING SAME, AND SPUTTERING TARGET

    New search for: INOUE KAZUYOSHI
    New search for: TOMAI SHIGEKAZU
    New search for: SHIBATA MASATOSHI

    A garnet compound represented by general formula (I) Ln3In2Ga3-XAlXO12. (In the formula, Ln represents one or more metal elements selected from among La, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu; and X satisfies 0 ≤ X < 3.)

    L'invention concerne un composé de grenat représenté par la formule générale (I) Ln3In2Ga3-XAlXO12. (Dans La formule, Ln représente un ou plusieurs éléments métalliques choisis parmi La, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb et Lu; et X satisfait 0 ≤ X < 3.)

    一般式（Ｉ）：　Ｌｎ３Ｉｎ２Ｇａ３－ＸＡｌＸＯ１２　（Ｉ）（式中、Ｌｎは、Ｌａ、Ｎｄ、Ｓｍ、Ｅｕ、Ｇｄ、Ｔｂ、Ｄｙ、Ｈｏ、Ｅｒ、Ｔｍ、Ｙｂ及びＬｕから選ばれた一種以上の金属元素を表す。Ｘは、０≦Ｘ＜３である。）で表されるガーネット化合物。

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    NOVEL GARNET COMPOUND, SINTERED BODY CONTAINING SAME, AND SPUTTERING TARGET

    New search for: INOUE KAZUYOSHI
    New search for: TOMAI SHIGEKAZU
    New search for: SHIBATA MASATOSHI

    A garnet compound represented by general formula (I) Ln3In2Ga3-XAlXO12. (In the formula, Ln represents one or more metal elements selected from among La, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu; and X satisfies 0 ≤ X < 3.)

    L'invention concerne un composé de grenat représenté par la formule générale (I) Ln3In2Ga3-XAlXO12. (Dans La formule, Ln représente un ou plusieurs éléments métalliques choisis parmi La, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb et Lu; et X satisfait 0 ≤ X < 3.)

    一般式（Ｉ）：　Ｌｎ３Ｉｎ２Ｇａ３－ＸＡｌＸＯ１２　（Ｉ）（式中、Ｌｎは、Ｌａ、Ｎｄ、Ｓｍ、Ｅｕ、Ｇｄ、Ｔｂ、Ｄｙ、Ｈｏ、Ｅｒ、Ｔｍ、Ｙｂ及びＬｕから選ばれた一種以上の金属元素を表す。Ｘは、０≦Ｘ＜３である。）で表されるガーネット化合物。

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    Title:

    NOVEL GARNET COMPOUND, SINTERED BODY CONTAINING SAME, AND SPUTTERING TARGET

    Additional title:

    NOUVEAU COMPOSÉ DE GRENAT, CORPS FRITTÉ LE CONTENANT, ET CIBLE DE PULVÉRISATION
    新規ガーネット化合物、それを含有する焼結体及びスパッタリングターゲット

    Contributors:

    INOUE KAZUYOSHI (author) / TOMAI SHIGEKAZU (author) / SHIBATA MASATOSHI (author)

    Publication date:

    2018-03-08

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    Japanese

    Classification:

    IPC:  C01G Verbindungen der von den Unterklassen C01D oder C01F nicht umfassten Metalle , COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F / C04B Kalk , LIME / C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL

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