A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
RARE-EARTH OXIDE BASED MONOLITHIC CHAMBER MATERIAL
A plasma resistant ceramic article comprises a plasma resistant ceramic material comprising 60-80 mol % of Y2O3, above 0 mol % to 9 mol % of ZrO2, and 20-40 mol % of Al2O3.
RARE-EARTH OXIDE BASED MONOLITHIC CHAMBER MATERIAL
A plasma resistant ceramic article comprises a plasma resistant ceramic material comprising 60-80 mol % of Y2O3, above 0 mol % to 9 mol % of ZrO2, and 20-40 mol % of Al2O3.
RARE-EARTH OXIDE BASED MONOLITHIC CHAMBER MATERIAL
SUN JENNIFER Y (author) / KANUNGO BIRAJA P (author)
2016-11-10
Patent
Electronic Resource
English