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SILICON NITRIDE POWDER, SILICON NITRIDE SINTERED BODY AND CIRCUIT SUBSTRATE, AND PRODUCTION METHOD FOR SAID SILICON NITRIDE POWDER
A silicon nitride powder having a specific surface area of 4.0 to 9.0 m2/g, a β phase proportion of less than 40 mass %, and an oxygen content of 0.20 to 0.95 mass %, wherein a frequency distribution curve obtained by measuring a volume-based particle size distribution by a laser diffraction scattering method has two peaks, peak tops of the peaks are present respectively at 0.4 to 0.7 μm and 1.5 to 3.0 μm, a ratio of frequencies of the peak tops ((frequency of the peak top in a particle diameter range of 0.4 to 0.7 μm)/(frequency of the peak top in a particle diameter range of 1.5 to 3.0 μm)) is 0.5 to 1.5, and a ratio D50/DBET (μm/μm) of a median diameter D50 (μm) determined by the measurement of particle size distribution to a specific surface area-equivalent diameter DBET (μm) calculated from the specific surface area is 3.5 or more.
SILICON NITRIDE POWDER, SILICON NITRIDE SINTERED BODY AND CIRCUIT SUBSTRATE, AND PRODUCTION METHOD FOR SAID SILICON NITRIDE POWDER
A silicon nitride powder having a specific surface area of 4.0 to 9.0 m2/g, a β phase proportion of less than 40 mass %, and an oxygen content of 0.20 to 0.95 mass %, wherein a frequency distribution curve obtained by measuring a volume-based particle size distribution by a laser diffraction scattering method has two peaks, peak tops of the peaks are present respectively at 0.4 to 0.7 μm and 1.5 to 3.0 μm, a ratio of frequencies of the peak tops ((frequency of the peak top in a particle diameter range of 0.4 to 0.7 μm)/(frequency of the peak top in a particle diameter range of 1.5 to 3.0 μm)) is 0.5 to 1.5, and a ratio D50/DBET (μm/μm) of a median diameter D50 (μm) determined by the measurement of particle size distribution to a specific surface area-equivalent diameter DBET (μm) calculated from the specific surface area is 3.5 or more.
SILICON NITRIDE POWDER, SILICON NITRIDE SINTERED BODY AND CIRCUIT SUBSTRATE, AND PRODUCTION METHOD FOR SAID SILICON NITRIDE POWDER
YAMAO TAKESHI (author) / HONDA MICHIO (author) / JIDA SHINSUKE (author)
2017-04-20
Patent
Electronic Resource
English
| European Patent Office | 2017
| European Patent Office | 2015
| European Patent Office | 2019
| European Patent Office | 2017
| European Patent Office | 2015