A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
SEMICONDUCTIVE CERAMIC MEMBER
A semiconductive ceramic member according to the present disclosure contains a plurality of aluminum oxide crystal grains, and a plurality of titanium oxide crystal grains. The total content of aluminum oxide and titanium oxide is 99% by mass or more per 100% by mass of all constituents. The content of the aluminum oxide is 86% by mass or more and 96% by mass or less and the content of the titanium oxide is 4% by mass or more and 14% by mass or less per 100% by mass of the aluminum oxide and the titanium oxide in total. A peak of TiOx (0
SEMICONDUCTIVE CERAMIC MEMBER
A semiconductive ceramic member according to the present disclosure contains a plurality of aluminum oxide crystal grains, and a plurality of titanium oxide crystal grains. The total content of aluminum oxide and titanium oxide is 99% by mass or more per 100% by mass of all constituents. The content of the aluminum oxide is 86% by mass or more and 96% by mass or less and the content of the titanium oxide is 4% by mass or more and 14% by mass or less per 100% by mass of the aluminum oxide and the titanium oxide in total. A peak of TiOx (0
SEMICONDUCTIVE CERAMIC MEMBER
TATEYAMA YASUHARU (author) / HIRANO YOSHINORI (author) / FUJITA NAOYA (author) / TSUJITAKE SENRI (author) / KOHSAKA SHOJI (author)
2022-01-20
Patent
Electronic Resource
English
SEMICONDUCTIVE CERAMIC MEMBER AND HOLDER FOR WAFER CONVEYANCE
| European Patent Office | 2019
SEMICONDUCTIVE CERAMIC MEMBER AND HOLDER FOR WAFER CONVEYANCE
| European Patent Office | 2018