A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
YTTRIUM OXIDE-BASED SINTERED BODY AND SEMICONDUCTOR PRODUCTION SYSTEM MEMBER
An yttrium oxide-based sintered body contains yttrium oxide as a main constituent and 0.1 wt % or more and 5.0 wt % or less of zirconium on a ZrO2 basis. Such an yttrium oxide-based sintered body made with yttrium oxide and a certain amount of zirconium oxide therein is highly resistant to corrosive chemicals while maintaining superior resistance to plasma and corrosive gases.
YTTRIUM OXIDE-BASED SINTERED BODY AND SEMICONDUCTOR PRODUCTION SYSTEM MEMBER
An yttrium oxide-based sintered body contains yttrium oxide as a main constituent and 0.1 wt % or more and 5.0 wt % or less of zirconium on a ZrO2 basis. Such an yttrium oxide-based sintered body made with yttrium oxide and a certain amount of zirconium oxide therein is highly resistant to corrosive chemicals while maintaining superior resistance to plasma and corrosive gases.
YTTRIUM OXIDE-BASED SINTERED BODY AND SEMICONDUCTOR PRODUCTION SYSTEM MEMBER
TAKAHASHI YUKI (author)
2023-04-13
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
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