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JOINED BODY, HOLDING DEVICE, AND ELECTROSTATIC CHUCK
A joining layer of a joined body includes a joining material which contains, as a main component, a metal having a surface tension of 1000 mN/m or less at its melting point, and a metal layer which has a plurality of pores formed therein and in which at least some of the pores are impregnated with the joining material.
JOINED BODY, HOLDING DEVICE, AND ELECTROSTATIC CHUCK
A joining layer of a joined body includes a joining material which contains, as a main component, a metal having a surface tension of 1000 mN/m or less at its melting point, and a metal layer which has a plurality of pores formed therein and in which at least some of the pores are impregnated with the joining material.
JOINED BODY, HOLDING DEVICE, AND ELECTROSTATIC CHUCK
YOSHIMOTO OSAMU (author) / ARAKAWA RYUICHI (author) / TANAKA TOMOO (author)
2023-10-05
Patent
Electronic Resource
English