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Plasma resistant ceramic coated conductive article
To manufacture a ceramic coated article, at least one surface of a conductive article is roughened to a roughness of approximately 100 micro-inches (μin) to approximately 300 μin. The conductive article may then be heated and coated with a ceramic coating comprising a yttrium containing oxide to a thickness of approximately 10-40 mil.
Plasma resistant ceramic coated conductive article
To manufacture a ceramic coated article, at least one surface of a conductive article is roughened to a roughness of approximately 100 micro-inches (μin) to approximately 300 μin. The conductive article may then be heated and coated with a ceramic coating comprising a yttrium containing oxide to a thickness of approximately 10-40 mil.
Plasma resistant ceramic coated conductive article
SUN JENNIFER Y (author) / KANUNGO BIRAJA P (author) / DUAN REN-GUAN (author) / NOORBAKHSH HAMID (author) / YUH JUNHAN (author) / LUBOMIRSKY DMITRY (author)
2016-07-19
Patent
Electronic Resource
English
IPC:
C23F
Nichtmechanisches Entfernen metallischer Stoffe von Oberflächen
,
NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES
/
B05D
PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
,
Verfahren zum Aufbringen von Flüssigkeiten oder von anderen fließfähigen Stoffen auf Oberflächen allgemein
/
B23K
Löten
,
SOLDERING OR UNSOLDERING
/
B32B
LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
,
Schichtkörper, d.h. aus Ebenen oder gewölbten Schichten, z.B. mit zell- oder wabenförmiger Form, aufgebaute Erzeugnisse
/
C04B
Kalk
,
LIME
/
C22C
Legierungen
,
ALLOYS
/
H01J
Elektrische Entladungsröhren oder Entladungslampen
,
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
/
H05K
PRINTED CIRCUITS
,
Gedruckte Schaltungen
- Manufacturing method of plasma resistant and conductive ceramic-nanocarbon composite
European Patent Office | 2019
CERAMIC COATED ARTICLE AND PROCESS FOR APPLYING CERAMIC COATING
European Patent Office | 2015
|Ceramic coated article and process for applying ceramic coating
European Patent Office | 2015
|- Plasma resistant and conductive ceramic-nanocarbon composite and manufacturing method of the same
European Patent Office | 2018
|