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Stiffness and frequency analysis of microaccelerometer

Wong-Wai, Chi / Hj Abdul Azid, I.H. / Majlis, B.Y.

This study used finite element analysis (FEA) to simulate and analyze the mechanical performance of the comb-finger type capacitive accelerometer. Structure modeling by using ANSYS(R) 8.1 is validated by the available data. The success of the model in predicting the stiffness constant and resonant frequency of the proof mass of accelerometer provides further encouragement in using the model to analyze the performance of the device for various combinations of geometry and different design in suspension beam. The suitability of different type suspension beam with different application in accelerometer is then suggested.

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Stiffness and frequency analysis of microaccelerometer

Wong-Wai, Chi / Hj Abdul Azid, I.H. / Majlis, B.Y.

This study used finite element analysis (FEA) to simulate and analyze the mechanical performance of the comb-finger type capacitive accelerometer. Structure modeling by using ANSYS(R) 8.1 is validated by the available data. The success of the model in predicting the stiffness constant and resonant frequency of the proof mass of accelerometer provides further encouragement in using the model to analyze the performance of the device for various combinations of geometry and different design in suspension beam. The suitability of different type suspension beam with different application in accelerometer is then suggested.

Stiffness and frequency analysis of microaccelerometer

Wong-Wai, Chi / Hj Abdul Azid, I.H. / Majlis, B.Y.

This study used finite element analysis (FEA) to simulate and analyze the mechanical performance of the comb-finger type capacitive accelerometer. Structure modeling by using ANSYS(R) 8.1 is validated by the available data. The success of the model in predicting the stiffness constant and resonant frequency of the proof mass of accelerometer provides further encouragement in using the model to analyze the performance of the device for various combinations of geometry and different design in suspension beam. The suitability of different type suspension beam with different application in accelerometer is then suggested.

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Title:

Stiffness and frequency analysis of microaccelerometer

Contributors:

Wong-Wai, Chi (author) / Hj Abdul Azid, I.H. (author) / Majlis, B.Y. (author)

Published in:

IEMT, International Conference on Electronics Manufacturing and Technology, 31 ; 341-346

Publication date:

2007

Size:

6 Seiten, 14 Quellen

ISBN:

Type of media:

Conference paper

Type of material:

Print

Language:

English

Keywords:

Beschleunigungsmesser , Elastizitätskonstante , Finite-Elemente-Methode , Rechneranwendung im Maschinenbau , mikromechanisches Gerät

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