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A Biaxial Capacitive Microaccelerometer with a Single Proof-Mass

Liu, Y. / Wen, Z.Y. / Chen, L. / He, X.F. / Wang, S.Q.

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A Biaxial Capacitive Microaccelerometer with a Single Proof-Mass

Liu, Y. / Wen, Z.Y. / Chen, L. / He, X.F. / Wang, S.Q.

A Biaxial Capacitive Microaccelerometer with a Single Proof-Mass

Liu, Y. / Wen, Z.Y. / Chen, L. / He, X.F. / Wang, S.Q.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

A Biaxial Capacitive Microaccelerometer with a Single Proof-Mass

Contributors:

Liu, Y. (author) / Wen, Z.Y. (author) / Chen, L. (author) / He, X.F. (author) / Wang, S.Q. (author)

Published in:

KEY ENGINEERING MATERIALS ; 483 ; 148-153

Publication date:

2011-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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In-Orbit Testing of the "MACEK" Microaccelerometer

Sehnal, L. / Peresty, R. / International Association of Geodesy | British Library Conference Proceedings | 1993

Multidisciplinary Design Optimization of the 2-D Microaccelerometer

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