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Design and Simulation of a Capacitive Biaxial Microaccelerometer

Liu, Y. / Wen, Z.Y. / Chen, L. / Yang, H.Y.

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Design and Simulation of a Capacitive Biaxial Microaccelerometer

Liu, Y. / Wen, Z.Y. / Chen, L. / Yang, H.Y.

Design and Simulation of a Capacitive Biaxial Microaccelerometer

Liu, Y. / Wen, Z.Y. / Chen, L. / Yang, H.Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Design and Simulation of a Capacitive Biaxial Microaccelerometer

Contributors:

Liu, Y. (author) / Wen, Z.Y. (author) / Chen, L. (author) / Yang, H.Y. (author) / Wang, X.

Published in:

Micro-Nano Technology XIII Selected, peer reviewed papers from the 13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China ; 194-200

KEY ENGINEERING MATERIALS ; 503

Publication date:

2012-01-01

Size:

7 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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Multidisciplinary Design Optimization of the 2-D Microaccelerometer

Liu, Y. / Wen, Z.Y. / Chen, L. et al. | British Library Online Contents | 2011

In-Orbit Testing of the "MACEK" Microaccelerometer

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