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Phase Transformation and Ion-Beam-Induced Crystallization in SiC Layers Formed by MEVVA Implantation of Carbon Into Silicon
Phase Transformation and Ion-Beam-Induced Crystallization in SiC Layers Formed by MEVVA Implantation of Carbon Into Silicon
Phase Transformation and Ion-Beam-Induced Crystallization in SiC Layers Formed by MEVVA Implantation of Carbon Into Silicon
Chen, D. (Autor:in) / Wong, S. P. (Autor:in) / Ho, L. C. (Autor:in) / Yan, H. (Autor:in) / Ma, E. / Materials Research Society
Symposium, Phase transformations and systems driven far from equilibrium ; 1997 ; Boston; MA
01.01.1998
6 pages
Held as symposium B of the 1997 MRS Fall meeting
Aufsatz (Konferenz)
Englisch
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