Growth of aluminium nitride on porous silica by atomic layer chemical vapour deposition

Puurunen, R. L. / Root, A. / Sarv, P. et al. | British Library Online Contents | 2000

Atomic layer deposition of iridium(III) acetylacetonate on alumina, silica-alumina, and silica supports

Silvennoinen, R. J. / Jylha, O. J. / Lindblad, M. et al. | British Library Online Contents | 2007

Atomic layer epitaxy of AlAs: growth mechanism

Ozeki, M. / Ohtsuka, N. | British Library Online Contents | 1994

Refractory nanoporous materials fabricated using tungsten atomic layer deposition on silica aerogels

Mane, A. U. / Greene, J. P. / Nolen, J. A. et al. | British Library Online Contents | 2012

Surface processes of selective growth by atomic layer epitaxy

Isshiki, H. / Aoyagi, Y. / Sugano, T. et al. | British Library Online Contents | 1994