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Electron cyclotron resonance plasma-assisted reactive pulsed laser deposition of compound films
Electron cyclotron resonance plasma-assisted reactive pulsed laser deposition of compound films
Electron cyclotron resonance plasma-assisted reactive pulsed laser deposition of compound films
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 17 ; 1692-1697
01.01.2002
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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