Spectroscopic ellipsometry on lamellar gratings

Antos, R. / Ohlidal, I. / Mistrik, J. et al. | British Library Online Contents | 2005

Modelling of multilayer films using spectroscopic ellipsometry

Chattopadhyay, K. / Aubel, J. / Sundaram, S. | British Library Online Contents | 1995

Analysis of interface layers by spectroscopic ellipsometry

Kim, T. J. / Yoon, J. J. / Kim, Y. D. et al. | British Library Online Contents | 2008

Spectroscopic ellipsometry on sinusoidal surface-relief gratings

Antos, R. / Ohlidal, I. / Franta, D. et al. | British Library Online Contents | 2005

Infrared spectroscopic ellipsometry of micrometer-sized SiO2 line gratings

Walder, Cordula / Zellmeier, Matthias / Rappich, Jörg et al. | British Library Online Contents | 2017