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Non-destructive identification of end-of-range damage in ion-implanted and annealed silicon
Non-destructive identification of end-of-range damage in ion-implanted and annealed silicon
Non-destructive identification of end-of-range damage in ion-implanted and annealed silicon
Shreter, Y. (Autor:in) / Evans, J. H. (Autor:in) / Hamilton, B. (Autor:in) / Peaker, A. R. (Autor:in)
APPLIED SURFACE SCIENCE ; 63 ; 227
01.01.1993
227 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
621.35
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