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    Non-destructive identification of end-of-range damage in ion-implanted and annealed silicon

    New search for: Shreter, Y.
    New search for: Evans, J. H.
    New search for: Hamilton, B.
    New search for: Peaker, A. R.

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    Non-destructive identification of end-of-range damage in ion-implanted and annealed silicon

    New search for: Shreter, Y.
    New search for: Evans, J. H.
    New search for: Hamilton, B.
    New search for: Peaker, A. R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Non-destructive identification of end-of-range damage in ion-implanted and annealed silicon

    New search for: Shreter, Y.
    New search for: Evans, J. H.
    New search for: Hamilton, B.
    New search for: Peaker, A. R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Non-destructive identification of end-of-range damage in ion-implanted and annealed silicon

    Contributors:

    Shreter, Y. (author) / Evans, J. H. (author) / Hamilton, B. (author) / Peaker, A. R. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 63 ; 227

    Publication date:

    1993-01-01

    Size:

    227 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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