Oxidation of ion implanted silicon carbide

Makhtari, A. / Raineri, V. / La Via, F. et al. | British Library Online Contents | 2001

Defect annealing in ion implanted silicon carbide

Calcagno, L. / Grimaldi, M. G. / Musumeci, P. | British Library Online Contents | 1997

Stoichiometric Disturbances in Ion Implanted Silicon Carbide

Morvan, E. / Monserrat, J. / Rebollo, J. et al. | British Library Online Contents | 1998

Range Distributions of Implanted Ions in Silicon Carbide

Janson, M. S. / Linnarsson, M. K. / Hallen, A. et al. | British Library Online Contents | 2002

Raman Image Study of Defects in Ion-implanted and Post-Annealed Silicon

Mizoguchi, K. / Nakashima, S. / Harima, H. et al. | British Library Online Contents | 1995