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    Photoreflectance investigation of dry-etch-induced damage in semi-insulating GaAs substrates

    New search for: Murtagh, M.
    New search for: Kelly, P. V.
    New search for: Herbert, P. A. F.
    New search for: O'Connor, M.

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    Photoreflectance investigation of dry-etch-induced damage in semi-insulating GaAs substrates

    New search for: Murtagh, M.
    New search for: Kelly, P. V.
    New search for: Herbert, P. A. F.
    New search for: O'Connor, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Photoreflectance investigation of dry-etch-induced damage in semi-insulating GaAs substrates

    New search for: Murtagh, M.
    New search for: Kelly, P. V.
    New search for: Herbert, P. A. F.
    New search for: O'Connor, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Photoreflectance investigation of dry-etch-induced damage in semi-insulating GaAs substrates

    Contributors:

    Murtagh, M. (author) / Kelly, P. V. (author) / Herbert, P. A. F. (author) / O'Connor, M. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 63 ; 158

    Publication date:

    1993-01-01

    Size:

    158 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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