Plasma assisted chemical vapour deposition of Cr coatings using chromium (III) acetylacetonate vapour source

Premkumar, P. A. / Kuppusami, P. / Dasgupta, A. et al. | British Library Online Contents | 2007

Preparation of silicon oxide films by ultraviolet-assisted rf plasma-enhanced chemical vapour deposition

Hozumi, A. / Sugimoto, N. / Sekoguchi, H. et al. | British Library Online Contents | 1997

Corrosion behaviour of TiN films obtained by plasma-assisted chemical vapour deposition

In, C. B. / Kim, S. P. / Chun, J. S. | British Library Online Contents | 1994

Chemical vapour deposition of silicon nitride in a microwave plasma assisted reactor

Monteiro, O. R. / Wang, Z. / Brown, I. G. | British Library Online Contents | 1996

Plasma-assisted deposition of metal and metal oxide coatings

Akbulut, H. / Inal, O. T. | British Library Online Contents | 1998