Plasma-assisted chemical vapour deposition of tin/oxide coatings

Inal, O. T. / Bengisu, M. / Guardian, J. | British Library Online Contents | 1993

Preparation, characterization and wear behaviour of TiN~x-coated cermets obtained by plasma-enhanced chemical vapour deposition

Endler, I. / Wolf, E. / Leonhardt, A. et al. | British Library Online Contents | 1994

Preparation of silicon oxide films by ultraviolet-assisted rf plasma-enhanced chemical vapour deposition

Hozumi, A. / Sugimoto, N. / Sekoguchi, H. et al. | British Library Online Contents | 1997

AIN thin films by plasma-enhanced chemical vapour deposition

Lee, C. H. / Wu, C. T. / Pueng, C. Y. | British Library Online Contents | 1992

Deposition of crystalline C3N4 films via microwave plasma chemical vapour deposition

Jiang, J. / Cheng, W. / Zhang, Y. et al. | British Library Online Contents | 2007