Plasma-assisted chemical vapour deposition of tin/oxide coatings

Inal, O. T. / Bengisu, M. / Guardian, J. | British Library Online Contents | 1993

AIN thin films by plasma-enhanced chemical vapour deposition

Lee, C. H. / Wu, C. T. / Pueng, C. Y. | British Library Online Contents | 1992

Hydrogen plasma-enhanced chemical vapour deposition of silicon carbide thin films from dodecamethylcyclohexasilane

Chiu, H.-T. / Huang, S.-C. | British Library Online Contents | 1993

Deposition of diamond-like carbon films by plasma enhanced chemical vapour deposition

Choi, S. S. / Kim, D. W. / Joe, J. W. et al. | British Library Online Contents | 1997

Chemical vapour deposition of silicon nitride in a microwave plasma assisted reactor

Monteiro, O. R. / Wang, Z. / Brown, I. G. | British Library Online Contents | 1996